You should read the thread before asking questions and ct, there is a neat search button in the top of the page.Any update on what happened to smee duv machine for 28nm? Is it still not being released?
I feel all the progress on AI and others mean nothing if China cannot break the lithography chokehold.
For the record, the guy who is talking is from Huazhong University of Science and Technology (HUST) and it seems thay developed an active anti-vibration platform for lithographic machines.
This conference was held in July this year (so already half year ago).
In one of the pictures, they refer to a 28nm litho machine that uses their anti-vibration system: it is visible the brand (a bit blurred), is a SMEE machine!
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Definitively looks like nothing that they have in their website and looks like they have some innovations because they didn't follow ASML scanners geometry.
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