Some of Huawei's solutions and trends in the semiconductor field:
1. Transistors can adopt a gate-all-around (GAA) structure, that is, the gate surrounds the channel. The gate-all-around structure improves the control ability of the gate by controlling the channel electric field in all directions, greatly reducing the short channel effect, so that the gate length can be reduced to 5nm or even smaller without basically affecting the performance. This design enhances the regulation of electrons in the channel, avoids the gate controlling the channel from only a single direction, and solves the problem of poor control of planar transistors at small sizes. Currently, Samsung has introduced a GAA structure in its 3nm process, called MBCFET; TSMC will introduce a GAA structure in its future 2nm process.
2. Nanotube disordered mesh films can be used instead of traditional silicon-based channel materials. Carbon nanotubes (CNTs) as channel materials have better electrical properties, especially at extremely small sizes (such as below 5nm), their carrier mobility is much higher than silicon. In addition, the nanotubes are arranged in a disordered mesh structure, which simplifies the process flow and avoids complex crystal alignment processes. The structure has good matching with the ring gate structure, which enables each nanotube to have uniform gate control capabilities and avoid local performance differences.
3. A multi-layer channel design can be adopted. The transistor includes a vertically stacked multi-layer channel structure, and each layer of the channel is separated by an independent gate. In this way, by increasing the number of channel layers in the vertical direction, the current density of the device can be effectively increased, and the on-state current and overall performance can be improved. In addition, each layer of the channel is separated by a gate to ensure that each channel can be uniformly and independently controlled, avoiding the interference effect that may occur when the channel is stacked in a traditional planar transistor.
4. High-k dielectrics (such as hafnium oxide) are used as gate dielectrics. Compared with traditional dielectric materials such as silicon dioxide, high-k dielectric materials have a higher dielectric constant (k value), which can improve the electric field control capability of the gate, thereby maintaining better electrical performance under smaller gate length conditions. This solution has been implemented in 7nm chips and has been widely adopted in the industry.
5. The gate can be made directly from palladium metal materials. Palladium metal has high chemical stability and good conductivity. As a gate material, it can simplify the manufacturing process and reduce the multiple process steps involved in traditional semiconductor processes. Currently, the industry mainly uses metal materials such as titanium and cobalt.
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