China has already conquered 28nm immersion machine SSA800i .. currently in fab pattering wafers from past 1+ year..
don't expect anything from Ministry or SMEE regarding official announcement.
Chinese semiconductor thread II
- Thread starter vincent
- Start date
don't expect anything from Ministry or SMEE regarding official announcement.
Shanghai Xinyuanwei's first chemical cleaning machine is successfully shipped
KS-CM300 single-wafer chemical cleaning machine is the first high-end equipment independently developed by Shanghai Xinyuan Micro. It is suitable for a variety of processes such as Pre-deposition, Post-thinfilm, Post-etch, Post-imp, Post-CMP, PR-strip, NiPt remove, etc. The high-temperature SPM cleaning process used by the machine is recognized by the industry as one of the processes with the highest performance requirements for 28nm/14nm processes, and it is also the most difficult and challenging wet process in the industry. The equipment developed by the company is expected to break the absolute monopoly of foreign leaders on high-temperature sulfuric acid cleaning technology. The machine performance and process technology are committed to reaching the international advanced level, and can achieve the processing of less than 30 residual particles below 26 nanometers. Under the condition of continuous operation of 100,000 pieces, it can meet the customer's Up-Time ≥ 95%, etching uniformity ≤ 2% and other stringent requirements. Its research and development and verification are expected to solve the unfavorable situation of domestic customers being controlled by others in this field. It has important strategic significance for promoting the independent control of domestic high-end semiconductor cleaning equipment, and it is also a milestone event for the company to expand the field of front-end chemical cleaning.
Review some old comments from Havok，we can get that:
SMEE new dry Arf machine has a performance similar to that of ASML
Arf dry will be mass produced before Arfi，and they will receive feedback from Chinese fabs before Arfi
Lens for Arf dry machine were being produced by CNEPO/国科精密，at the rate of five sets per year
The above info were from 2023 Jun，a year has passed since then，what has changed is unknown
SMEE new dry Arf machine has a performance similar to that of ASML
Arf dry will be mass produced before Arfi，and they will receive feedback from Chinese fabs before Arfi
Lens for Arf dry machine were being produced by CNEPO/国科精密，at the rate of five sets per year
The above info were from 2023 Jun，a year has passed since then，what has changed is unknown
There were already talks of potential ASML refusing services to Chinese scanners in 2023. YMTC already spoken about suing ASML and asked it to buy back the equipments.
knowing the potential refusing services pitfall. tHen why record numbers of ASML scanners still being purchased in 2024 by China.
Instead of asking ASML to buy back if refusing services,
Probably. the thinking is to use any broken equipments as "Spare parts" to maintain production for the next few years using ASML scanners while waiting for domestic substitution to mature. Repairs will be undertaken by chinese companies themselves.
There 5 independent paths being pursued by various companies and entities.
1)KrF and Dry ArF scanner
2)Immersion ArFi scanner
3)advanced immersion ArFi scanner
4)EUV scanner
5)Vast stockpile and potential "spare parts" of ASML scanners.
knowing the potential refusing services pitfall. tHen why record numbers of ASML scanners still being purchased in 2024 by China.
Instead of asking ASML to buy back if refusing services,
Probably. the thinking is to use any broken equipments as "Spare parts" to maintain production for the next few years using ASML scanners while waiting for domestic substitution to mature. Repairs will be undertaken by chinese companies themselves.
There 5 independent paths being pursued by various companies and entities.
1)KrF and Dry ArF scanner
2)Immersion ArFi scanner
3)advanced immersion ArFi scanner
4)EUV scanner
5)Vast stockpile and potential "spare parts" of ASML scanners.
it is not illegal to provide 3rd party service. in fact in the US this is done all the time.
A bit of misunderstanding but still good the lithography suppliers are rallying.
Or they know something from their industry sources ¯\_(ツ)_/¯
Well they are the small suppliers not the big ones because those are still not listed. most of their investment is private.
Chinese semiconductor industry
A sub-system provider of SMEE and probably other lithography companies in China depending on the type of system. https://mloptic.com/ EMPOWERING SEMICONDUCTOR EQUIPMENT In the field of semiconductors, Maolai Optics can provide integrated solutions from design, manufacturing, assembly and...
www.sinodefenceforum.com