This is an old video I found on EUV light source experiments in China.
It shows that at least China has some experience with building EUV light sources. Maybe it's not good enough for a lithography, but at least they are not starting from complete scratch.
Although, I think the design of this light source is very different from ASML EUV which uses a tin dropper. Aka DPP.
But according to this paper, the Free electron laser solution in the video could be a contender for EUV lithography.
@WTAN whats your thoughts on Non-DPP light sources?
It shows that at least China has some experience with building EUV light sources. Maybe it's not good enough for a lithography, but at least they are not starting from complete scratch.
Although, I think the design of this light source is very different from ASML EUV which uses a tin dropper. Aka DPP.
But according to this paper, the Free electron laser solution in the video could be a contender for EUV lithography.
@WTAN whats your thoughts on Non-DPP light sources?
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