China Interferometer Landscape.
Shanghai Qianyao Technology
Quantum laser interferometer Q-Laser 9000:
By using the self-developed "dual-frequency laser orthogonal demodulation technology", it achieved a repeatable positioning accuracy of ±0.05nm in the detection of the 28nm lithography machine motion platform, forcing Agilent of the United States to reduce the price of similar products in China by 28%.
Industrial site solutions:
We jointly built a "dynamic environmental compensation system" with SMIC, which maintained a measurement stability of 99.7% under harsh conditions where the workshop vibration exceeded the standard by 5μm/s², rewriting the ASME B89.1.7 standard.
Suzhou Huili Instruments - AI Revolutionary in Optical Measurement
Intelligent White Light Interferometer Wisper-7D:
Equipped with the world's first "deep learning morphology reconstruction engine", it increases the speed of 3D surface roughness inspection to 0.8 seconds per field of view, replacing 70% of the US Bruker market share in the automotive engine cylinder inspection market.
Cloud Collaborative Network:
By building a cross-factory measurement data lake and training AI models in real time through 160,000 devices, the accuracy of defect recognition has increased by 3.2% every quarter, forming a technological iteration moat
FiberSight XT fiber distributed interferometer:
In the Sichuan-Tibet Railway project, 200km distributed strain monitoring was achieved, and the temperature drift was controlled at 0.02pm/℃, with parameters exceeding the HD-FOS system of Luna Company in the United States.
Deep sea 10,000-meter pressure-resistant design:
The titanium alloy photonic crystal packaging technology was used to help the Jiaolong complete the deformation monitoring of submarine optical cables at 10,909 meters in the Mariana Trench, breaking the technical blockade of Japan's JAMSTEC
Extreme Ultraviolet Interferometry System EUV-IM:
It provides λ/1000 (@13.5nm) wavefront detection capability for lithography machines, enabling the workpiece stage stitching accuracy to reach 0.12nm. The key technology won the 2023 China Patent Gold Award.
Spaceborne interferometer Tianxun series:
The Fengyun-4 meteorological satellite achieved 0.01°C resolution monitoring of space temperature field, and the data quality was rated five stars by the World Meteorological Organization.
NanoTracker nanodisplacement measurement system:
Based on common optical path interference design, the uncertainty of displacement measurement in the semiconductor packaging process is reduced to 0.3nm, helping Changdian Technology to increase its yield to 99.9995%.
Wafer-level online detection solution:
Developed a 12-inch wafer fully automatic scanning system, with a daily inspection capacity of over 1,500 wafers, and a 42% increase in overall efficiency compared to Zygo in the United States.