Chinese semiconductor thread II

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The paper on storage and computing integrated chip of the Institute of Microelectronics was selected for ISSCC 2025 conference​

The team led by Researcher Zhang Feng from the National Key Laboratory of Integrated Circuit Manufacturing Technology has designed a transposable approximate and precise dual-mode floating-point storage and calculation integrated macro chip. Through the proposed cyclic weight mapping SRAM scheme, the chip can reuse the multiplication and addition units in forward and reverse propagation, and while realizing the transposition function, it greatly improves the energy efficiency and computing power density compared to the previous transposition storage and calculation integrated macro unit. Through the proposed signed fixed-point mantissa encoding method and vector granularity pre-alignment scheme, the chip realizes the compatibility support of multiple floating-point and fixed-point number systems, and has a smaller precision loss than the traditional coarse-grained floating-point pre-alignment scheme.

Through the proposed approximate and precise dual-mode multiplication and addition circuit design, the chip can turn on the approximate mode in the reasoning link with low precision requirements, thereby obtaining a 12% speed increase and a 45% energy consumption reduction, and can turn on the precise mode in the training link with high precision requirements to ensure no precision loss. The storage and calculation integrated macro chip is taped out under the 28nm CMOS process and can support BF16, FP8 floating-point precision operations and INT8, INT4 fixed-point precision operations. The average energy efficiency of BF16 floating-point matrix-matrix-vector calculations reached 48TFLOP/W, and the peak energy efficiency reached 100TFLOPS/W; the average energy efficiency of FP8 floating-point matrix-matrix-vector calculations reached 192.3TFLOP/W, and the peak energy efficiency reached 400TFLOPS/W. This research result provides new ideas for storage-computing integrated architecture chips used for edge training.

The above work was selected for ISSCC 2025 with the title of " A 28nm 192.3TFLOPS/W Accurate/Approximate Dual-mode Transpose Digital 6T-SRAM Compute-in-Memory Macro for Floating-Point Edge Training and Inference ". Yuan Yiyang, a doctoral student at the Institute of Microelectronics, is the first author, and Zhang Feng, a researcher, and Li Xiaoran, an assistant professor at Beijing Institute of Technology, are the corresponding authors. This research result was supported by the Key R&D Program of the Ministry of Science and Technology, the National Natural Science Foundation, and the Strategic Priority Research Program of the Chinese Academy of Sciences.

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A fluorine-containing polymer and its preparation method and ArF immersion photoresist made from the polymer​

CN119285842A​

Ruihong Suzhou Electronic Chemicals Co ltd

Abstract​

The present application relates to the technical field of photolithographic materials, and specifically discloses a fluorine-containing polymer and a preparation method thereof, and an ArF immersion photoresist prepared using the polymer. A fluorine-containing polymer comprises, by mol%, 5-15 mol% of an A monomer, 55-80 mol% of a B monomer and 15-30 mol% of a C monomer, wherein the A monomer is a methacrylate monomer having a lactone side chain, the B monomer is a methacrylate monomer having a protective group on the side chain, and the C monomer is a methacrylate monomer having a fluorine-containing side chain. The preparation method comprises the steps of dissolving, heating reaction, purification, drying and the like. The fluorine-containing polymer of the present application can be used to prepare ArF immersion photoresist, can form a water-resistant layer with excellent hydrophobicity on the surface of the photoresist, has good compatibility with the ArF immersion photoresist, and significantly improves the development performance of the photoresist.​
 

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A temperature fluctuation attenuator based on cascade system and optimized manufacturing method​

CN119002193A​

Zhejiang University ZJU

Abstract
The present invention discloses a temperature fluctuation attenuator based on a cascade system and an optimized manufacturing method. The temperature fluctuation attenuator includes a main shell and a plurality of porous plates. The interior of the main shell is hollow to form a cavity structure. Each porous plate is a circular plate with small holes. The plurality of porous plates are arranged in parallel and spaced along the flow direction of the fluid. Each porous plate is perpendicular to the flow direction of the fluid and is used to block the flow and attenuate the fluctuation of the fluid. The optimized manufacturing method includes obtaining the volume V of the cavity structure, the diameter D of the porous plate, the density ρ of the ultra-clean fluid, the flow velocity v of the fluid and the time lag time τ, and then constructing a time lag model G(s) of the temperature fluctuation attenuator. Finally, the time lag model G(s) is optimized and solved to solve the number N of the porous plates, the number n of the small holes on the porous plates, and the aperture d of the small holes on the porous plates, thereby manufacturing the optimized temperature fluctuation attenuator. The present invention improves the attenuation performance of the attenuator under high-frequency temperature disturbance, which is beneficial to improving the temperature control accuracy of the lithography machine.

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