Huahai Qingke's chemical mechanical polishing equipment achieves full coverage of the dielectric layer!
Huahai Qingke developed China first 12-inch "dry-in and dry-out" CMP equipment and series of products. The overall technology reached the international advanced level, achieved mass production of 28nm process, and had the ability to expand 14-7nm process, creating many domestic equipment records. A total of more than 110 units have been applied to large production lines for advanced integrated circuit manufacturing, and the market share and import substitution rate are both among the top domestic IC equipment. The series of achievements filled the domestic gap, broke the monopoly of international giants, and realized the mass industrialization application of domestic polishing equipment for the first time. At present, the company's chemical mechanical polishing (CMP) equipment has achieved comprehensive coverage of dielectric layers such as polysilicon, silicon dioxide, silicon nitride, and aluminum oxide.