from internet
NXE: 3400B is ASML's first generation of EUV that is truly put into mass production. Its LPP power is 250W and its laser power is 20kW. The latest news is that the domestic level in the middle of last year was several kW, which seems to be far behind. However, in fact, ASML's 20kW laser power is composed of more than one 13kW laser connected in series, so the gap is not so big at first glance.
At the same time, NXE: 3400B is not ASML's first generation of EUV. There are several generations before it, but they are only experimental equipment and have not been put into mass production lines. The previous generation of 3400B is 3300B, whose lpp power is only 80w. This model itself has been mass-produced and sold to some research institutions for testing. In other words, the 80w 3300B can also produce chips, but the cost is high and the efficiency is low, which cannot meet the requirements of TSMC and Samsung's mass production lines, so it can only be sold to some chip research institutions.
In this way, even if the laser stops at a few KW forever, it is no problem to build a 3300B-level EUV now. Such equipment can also be put into mass production lines as a last resort, and it still produces 13.5nm extreme ultraviolet light, and can still produce 5nm3nm, but the cost is higher (Isn't Kirin 9000s1 such a high-cost product as a last resort?)
