唐教授领导团队研发自主知识产权的EUV光源,采用高功率射频激励CO₂激光器产生极紫外光。技术难度高,需要精确控制激光器输出和锡滴喷射。团队成员不畏困难,经过多年努力,取得重大技术突破,为我国半导体产业自主发展提供支持
HUST RF slab CO2 laser for EUV MOPA preamp and laser spike annealing. Already supplying to HW, SMEE and SMIC. I get the feeling that we might see euv-produced chips H2 2025 or H1 2026