The guy in the post talk about the micromirror array illuminator of the lithography that due patterning and overlay reasons has to send the light to the wafer in different shapes for efficiency because sadly for us nature decided to slap fab workers in the face and be a wave and particle at the same time, so you have to find workarounds to increase the resolution of your optical fabrication tools.
The I saw this guy tweet bragging about the FlexRay
MEMS <lets keep in mind that> micromirror array. Pretty neat technology to be honest the closest thing to maskless DUV lithography and also one the early use of advance packaging.
"FlexRay and Tachyon SMO are two key, complementary ingredients in ASML’s
holistic lithography portfolio."
Back in the day when the first SMEE ArF scanner was out they where using microlenses.
I thought to myself wow, they got me there, who is supplying this in China? Well China has two big MEMS manufacturers SAI micro and SMEC, they have advance packaging companies and they have fabs that can make ASIC chips 28nm down to 7nm. All boil downs to logic.
So yes looks like that China has narrow down on this technology and they recently published a paper discussing this tech.
Statement of one the micro-mirror mems manufacturers in China:
"international operation of high-end integrated circuit wafer foundry manufacturers, but also domestic with independent intellectual property rights and master the core semiconductor manufacturing technology of the characteristics of the process of professional wafer manufacturers. The company has many pilot platforms and mass production factories at home and abroad, and its business covers the world. Its service customers include internationally renowned DNA/RNA sequencer,
lithography machine, computer network and system, silicon photon, infrared, wearable equipment, new medical equipment, automotive electronics and other giant manufacturers, as well as leading enterprises in the sub industry, The product range covers many fields such as communication, biomedical, industrial automobile, consumer electronics, etc. At the same time, the company is building
advanced wafer-level packaging and testing capabilities, is committed to providing customers with systematic high-end manufacturing services from process development, wafer manufacturing to packaging and testing, and strives to develop into a well-known semiconductor manufacturing leader with international operations. "
holistic lithography: