KiloWatt Class Lasers for EUV Lithography, already going commercial.
The project of "Key Technology and Industrialization of High-Power Thin-Disk Ultrafast Lasers" conforms to the inherent needs of ultra-precision manufacturing development and manufacturing transformation and upgrading, focusing on the key technologies of kilowatt-class solid-state lasers, especially ultrafast lasers, with the goal of quickly realizing the industrialization of high-power thin-disk ultrafast lasers in China. With its advantages of high energy, narrow pulse width, high repetition rate, high peak power and high average power, this laser technology can not only overcome the heat dissipation limitations of the traditional rod-shaped crystal structure technology route, but also avoid the shortcomings of the fiber laser technology route that is not suitable for large pulse energy and high peak power due to laser damage and nonlinearity. It can better realize high-efficiency, high-quality, high-reliability and low-cost precision processing, especially "cold processing", and is suitable for high-end processing scenarios in many fields such as aerospace, semiconductors, new displays, new energy, automobiles, carbon fiber, robots, biomedicine, scientific research, etc. Among them, in the field of ultra-precision machining, the laser can achieve efficient machining, effectively reduce flying chips and burrs, and improve production efficiency; in the semiconductor field, high-energy, high-repetition-rate ultrafast lasers are the core technology supporting EUV light source pre-pulses; in the field of cutting-edge science, thin-film laser technology is an effective means to achieve high-average-power attosecond drive pulses, providing an effective path for attosecond technology to move towards commercial use; in other high-end processing scenarios such as new displays, high-power, large-pulse-energy ultraviolet and deep ultraviolet thin-film lasers will replace the excimer lasers that currently need to be imported with better stability and better costs. It can be seen that thin-film lasers have broad application prospects in many high-end and cutting-edge fields and will support the development of these fields.
Internationally, Germany's TRUMPF has mastered this laser technology and launched a series of products. However, the industrialization of this laser in China is still blank, and the gap with the aforementioned companies is concentrated in key technologies such as the design, manufacturing and packaging process of thin-film laser gain modules and multi-stroke pump modules. As a leading domestic solid-state and ultrafast laser company, has made breakthroughs in many key technologies based on its own profound technical and industrialization accumulation and through years of cooperative research with leading domestic scientific research institutions, and has a solid foundation for promoting industrialization.
This time, has joined hands with leading domestic research institutions such as the Dalian Institute of Chemical Physics, Chinese Academy of Sciences, Zhejiang University, and Shenzhen University to focus on the design, manufacturing and packaging process of thin-disk laser gain modules with completely independent intellectual property rights, multi-stroke pump modules, and high-power picosecond thin-disk laser core components. It will form more innovations and invention patents in design, materials, processing, packaging, and debugging, accelerate the industrialization process of high-power thin-disk ultrafast lasers, and thus support the development of high-end manufacturing.
As one of the "major science and technology special projects", the Shenzhen Science and Technology Innovation Bureau has recently approved the project to fund the company to achieve its expected goals.
The "Key Technology and Industrialization of High-Power Thin-Disk Ultrafast Lasers" project is based on the company's deep technical and industrial accumulation in the field of solid-state and ultrafast lasers. It will achieve a leap from hundreds of watts to thousands of watts for industrial-grade lasers with completely independent intellectual property rights, and open up new and broader application areas with significant performance advantages. The company will take this as an opportunity to uphold innovation-driven development, firmly follow the path of "specialization, precision and innovation", further strengthen its leading edge in the domestic laser industry, enhance its competitiveness in the global laser industry, and fulfill its mission of "using lasers to benefit mankind".
