I’m curious if tmp is used anywhere on a DUV. My guess is no
1. Duv wavelength can travel thru air, so no need for vacuum
2. Immersion water would evaporate under vacuum
Yes, TMP is not used in immersion DUV lithography. This is a reason why costs for DUV are much lower than EUV. EUV is not only expensive for the EUV, it is expensive for the vacuum system that must handle moving parts like stage and reticle. Other vacuum chambers like CVD, PVD, diffusion furnace, wafer bond, etc do not need internally moving parts, only wafer transfer mechanisms.