Hangzhou Gallium Semiconductor applied for a patent for a method of slicing a polished gallium oxide single crystal substrate to reduce defects such as wafer cleavage, chipping and microcracks around the cutting path.According to information from the State Intellectual Property Office, Hangzhou Gallen Semiconductor Co., Ltd. has applied for a patent titled "A Slicing Protection Layer Structure for a Gallium Oxide Single Crystal Substrate Polishing Wafer and Its Slicing Method".
Information from the National Intellectual Property Administration shows that Hangzhou Gallen Semiconductor Co., Ltd. has applied for a patent titled "A slicing protection layer structure for a gallium oxide single crystal substrate polishing wafer and its slicing method", publication number CN 118752386 A, and application date August 2024.
The patent abstract shows that the present invention provides a slicing protection layer structure and slicing method for a gallium oxide single crystal substrate polishing wafer, which belongs to the technical field of processing gallium oxide single crystal substrate polishing wafers. The slicing protection layer structure of the present invention includes a stacked slope fixture, a carrier, a second soft protective layer, a gallium oxide wafer, a first soft protective layer and a hard protective layer from bottom to top, and the slope fixture ensures that the cutting path along the (010) crystal plane direction of the gallium oxide wafer is cut at a slope angle. In the present invention, the role of the first soft protective layer and the second soft protective layer is to prevent the surface of the polished wafer from being scratched by hard objects and contaminated by the cooling medium, and the role of the hard protective layer is to offset part of the normal force of the grinding wheel on the (100) easy cleavage crystal plane during the slicing process; the slope fixture will further decompose the normal force applied by the grinding wheel to the (100) crystal plane, thereby reducing the generation of defects such as wafer cleavage, collapse and microcracks around the cutting path. The dicing method of the present invention has a fast cutting speed and can directly dicing a polished wafer without causing defects such as scratches and contamination on the wafer surface.
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Garen is pretty good. A month ago, they developed ultra thin Gallium Oxide 6-inch substrate, which solves the problem of low thermal conductivity for Gallium Oxide. There will be plenty of good application in power semiconductor
From a few months ago
So these guys, Semicorex also got 6-inch Gallium Oxide industrialized and they say it can be used RF and military field. So, I'm looking forward to these appearing in radar or EW equipments.Compared with traditional Silicon Carbide semiconductor materials, the fourth-generation semiconductor material has a higher withstand voltage, lower cost, and higher energy saving efficiency. With its excellent performance and low-cost manufacturing, is mainly used to prepare power devices, radio frequency devices and detection devices. It is widely used in rail transit, smart grids, new energy vehicles, photovoltaic power generation, 5G mobile communications, national defense and military industries, etc. field.
In the next 10 years or so, devices are likely to become competitive power electronic devices and will directly compete with Silicon Carbide devices. In addition, the industry generally believes that in the future, is expected to replace and Gallium Nitride to become the representative of a new generation of semiconductor materials.
Fujia Gallium a month ago said they've started work for production line of 6-inch Gallium Oxide substrate line.
Looks like we are getting close to commercialization of Gallium Oxide