"Yixing City Integrated Circuit Industry Cluster Development Three-Year Action Plan (2023-2025)" was released to enhance the high-quality development level of Yixing's integrated circuit industry and promote the realization of materials and chip manufacturing The integrated development of packaging and testing, equipment and parts manufacturing will build Yixing into the largest integrated circuit materials industry cluster in East China.
(1) Special materials for integrated circuits
Focus on supporting the development of integrated circuit base materials such as large-size silicon wafers, third-generation semiconductor substrates and epitaxial materials, and fourth-generation semiconductor materials. Efforts will be made to improve the production level of integrated circuit materials such as high-precision masks, high-purity targets, photoresists for integrated circuits, electronic specialty gases, electronic bulk gases, and wet electronic chemicals. Accelerate the layout of integrated circuit packaging materials such as ceramic packaging materials, high-end plastic packaging materials, and high-density packaging substrates, promote the research and development and industrialization of key materials, and accelerate verification and application iteration.
(2) Wafer manufacturing
Focus on supporting key enterprises in the industry to build integrated circuit wafer manufacturing production lines, improve technology levels, and expand production capacity.
Promote the construction of 8-inch and 12-inch production lines with unique and mature processes such as analog and digital-analog hybrid, image sensing, micro-electromechanical systems, and power semiconductors to enhance the Internet of Things, automotive electronics, artificial intelligence, AR (augmented reality)/VR ( Virtual reality) and other fields of chip and module manufacturing and supply capabilities. Actively deploy 4-inch and above silicon carbide, gallium nitride and other compound semiconductor chip manufacturing lines to promote the establishment of related radio frequency front-end module manufacturing companies. Support chip manufacturing companies to cooperate with design companies, packaging and testing companies to develop vertical integration (IDM) models, cultivate IDM companies in fields such as analog chips, radio frequency chips, sensor chips, and third-generation semiconductors to improve process levels and production capacity.
(3) Packaging and testing
Develop silicon-based MOSFETs (metal-oxide semiconductor field-effect transistors) and modules, radio frequency devices, micro-electromechanical systems and other special process chip packaging, and promote the development of chip-scale packaging (CSP) and ceramic packaging. Vigorously introduce wafer level packaging (WLP), system level packaging (SiP), through silicon via (TSV), 2.5D/3D (2.5D/3D) packaging, bumping, and board-level fan-out packaging ( FOPLP) and other advanced packaging production lines, strengthen the research and industrialization of key technologies such as heterogeneous isomers and chiplets, and improve advanced packaging capabilities.
(4) Equipment manufacturing
Focus on the development of thin film growth equipment, etching equipment, wet equipment, chemical mechanical polishing (CMP) equipment, photolithography equipment and other process equipment, as well as packaging equipment such as thinning, dicing, loading, bonding, plastic packaging, and wafer testing, The technical level of testing equipment such as finished product testing and optical inspection.
(5) Chip design
Focusing on the key aspects of chip design, we will accelerate the "chain replenishment" of the integrated circuit industry and accurately attract integrated circuit design companies. Focusing on emerging application fields such as the Internet of Things, vehicle networks, industrial Internet, and new energy vehicles, we will support the development of chip design companies in various application scenarios.