Lithography is the critical equipment in Wafer fabrication but is totally useless with the rest of the tools, Ok, you bought the ASML NXT-2100, now you need coating-developing tools that can deposit photo resist with good uniformity, deposition tools for the different materials with enough uniformity and throughput, furnaces for oxidation and ion implanters for doping, RPT tools to annealing, Chemical Mechanical Polishers for wafers without damaging the made structures, etching tools that can handled the High Aspect Ratios of modern transistor, precision cleaning tools, metrology tools for yield monitoring, overlay metrology and CDSEM.
And then you have to take into account the materials like photo-resists, gases, liquids and their delivery subsystems, vibration isolation for the lithography machine. the lithography machines is useless without good photoresist, more useless without good overlay metrology and even more useless without good etching tools. And every single of those tools need their subsystems like RF-Matching Networks and maglev pumps.
Only thinking in the lithography machine is the trap that a lot pundits fall into.
I agree in general, but today, in September 2024, litho is the only remaining weak link in the chain, because all the other pieces already fell into place.
This is a testament to the impressive, miraculous improvement of Chinese SME ecosystem.
Just 5 years passed since
, when US fired the first big salvo on Huawei, a real
Pearl Harbor moment for China. At the time SME ecosystem in China was scattered and filled with gaps. At the time the few local SME companies usually had subpar products kept at prototype/ small batch stage, due to very limited possibility of testing in real production. AMEC, NAURA where small players both in revenues and in product range and performances.
What happened in these 5 years will remain in history books!
Nobody in the West, first of all US administration, would have bet China was able to build a full local SME ecosystem as it is today. Only Japan did something similar but along the '80s and '90s of last centrury: 20 years against 5 of China!
Sure, some tool and material are still not at the advanced level, but they are anyhow ahead of litho and they will remain ahead of litho: when SMEE will be able to do 14nm the surrounding ecosystem will be ready, and so on for 7nm and lower...
So today lithographic machine is really the focus of the tech war, the last hurdle to overcome. Even US officials realized that: their full effort now is to stop ASML, they don't care anymore of the other types of machines / materials.