For 7nm and below nodes! #Shanghai Microelectronics discloses invention patent for "Extreme Ultraviolet Radiation Generator and Photolithography Equipment"#
Tianyancha shows that #Shanghai Microelectronics# Equipment (Group) Co., Ltd. disclosed an invention patent called "Extreme Ultraviolet Radiation Generator and Photolithography Equipment" on September 10. The application date is March 9, 2023, and the application number is CN202310226636.7. The inventors are Wang Weiwei, Fu Hui, Lu Jiaxi, Zhang Hongbo, Cai Wanchong, and Zhang Zichen.
Tianyancha shows that #Shanghai Microelectronics# Equipment (Group) Co., Ltd. disclosed an invention patent called "Extreme Ultraviolet Radiation Generator and Photolithography Equipment" on September 10. The application date is March 9, 2023, and the application number is CN202310226636.7. The inventors are Wang Weiwei, Fu Hui, Lu Jiaxi, Zhang Hongbo, Cai Wanchong, and Zhang Zichen.
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