Xingji Micro-Equipment's power device direct writing lithography equipment exported to Japan
Xingji Micro-Equipment, a leading domestic manufacturer of direct write lithography equipment, exported its MLF series equipment to Japan for the first time.
The MLF series direct-write lithography equipment is designed for high-precision, high-efficiency pan-semiconductor packaging applications, especially for power semiconductors, such as the packaging process of insulated gate bipolar transistors (IGBTs). The equipment is equipped with an advanced equipment front-end module (EFEM), which can support the fully automatic operation process of 12-inch wafers, significantly improving production efficiency and process consistency. Core Micro will provide technical support and services to Japanese customers throughout the process to ensure efficient and stable operation of the equipment.
This export marks a solid step forward for Xingji Micro-Equipment in its globalization strategy and further consolidates its leading position in the field of direct writing lithography equipment.
The MLF series direct-write lithography machine adopts advanced digital lithography technology. It does not require a mask and can directly transfer layout information to a substrate coated with photosensitive materials. It is suitable for third-generation semiconductor silicon carbide process applications, power semiconductors ( IGBT ), ceramic substrates and other application fields. The MLF series products have a compact structure, a large depth of field, a fast speed, and good process adaptability for both dry film and photoresist. It is an economical and flexible mass production equipment.