At 10:16 am on May 20, 2024, the opening ceremony of the Class 100 clean room of the Tianren Nanoimprint Pilot Platform Phase I (NTS Center - Nanoimprint Total Solution Center) was successfully held! The clean room of the Nanoimprint Pilot Platform (Phase I) covers an area of about 1,600 square meters, including Class 100, Class 1,000 and Class 10,000, with nearly 100 equipments and a total investment of several hundred million yuan.
The equipment includes more than 30 nanoimprint equipment of various models produced by Tianren Micro-Nano, ranging from hot imprinting, transfer printing to UV imprinting, and from roller pressing to surface pressing to SR stepping imprinting. The substrate size ranges from wafer pieces to 2/3/4/6/8/12 inches, panel-level G2 and G5 sizes, and the equipment types include manual loading and unloading, cassette to cassette automatic loading and unloading equipment, as well as nanoimprint cluster production line equipment (3 units) that includes the entire process from wafer cleaning, plasma treatment, glue coating, heat treatment, automatic replication of working molds, automatic alignment, imprinting, curing, demolding, etc. In addition, various imprint process supporting and characterization equipment are complete, including wafer fully automatic RCA, organic cleaning, Plasma, HMDS, mold anti-sticking treatment and other pre-treatment equipment, various glue coating equipment, 8 semi-automatic spin-coating equipment, 3 fully automatic equipment, ink jet printing, slot die coating, slit coating, automatic dispensing of microlenses and other equipment; nanoimprint mold manufacturing equipment includes electron beam lithography, laser direct writing, mask aligner, laser interference exposure, ICP, RIBE, degumming machine, ALD, electroforming mold, wafer bonding, etc.; characterization equipment includes SEM, AFM, confocal, FIB, ellipsometer, film thickness meter, step meter, water drop angle tester, etc.
Tianren Micro-Nano NTS Center should be the most comprehensive pilot platform for nanoimprint segment equipment and supporting process equipment in the world. Tianren Micro-Nano is equipped with more than 50 senior process engineers on this platform to provide customers with technical support, material knowhow and project experience. The goal of this pilot platform is to allow customers to realize innovative product ideas using nanoimprint-related technologies on this platform at a very low cost, from prototype to product pilot, to verify the performance of Tianren Micro-Nano nanoimprint equipment and open up the last mile for customers' future product mass production.
