China has mastered Nano Precision Maglev Wafer Workbenches
IC Lithography Metrology.
Shanghai IC Equipment Material Industry Innovation Center.
CN117055298AAbstract
The application discloses a measuring machine, which belongs to the technical field of integrated circuits, and comprises: the device comprises a measuring optical system, a magnetic suspension wafer workbench and at least three gratings; the measuring optical system and the grating are positioned above the magnetic suspension wafer workbench; fixing the position of the measuring optical system; the grating is arranged along the circumferential direction of the measuring optical system; the magnetic suspension wafer workbench comprises a magnetic suspension workbench, a wafer sucker and at least three position sensor reading heads; the wafer sucker and the position sensor reading head are arranged on the surface of the magnetic suspension workbench, which is close to the measuring optical system; the position sensor reading head is arranged along the circumferential direction of the wafer sucker; when measuring the wafer, each grating and a position sensor reading head corresponding to the grating perform optical signal interaction so as to measure the position information of the magnetic suspension wafer workbench. The application can accurately control the magnetic suspension wafer workbench to realize 6 degrees of freedom movement, thereby reducing transmission errors and improving movement precision.