All information about 28nm lithography are still just rumors,there is no official announcement regarding the machine as of now
Things i know officially
1- SMEE announced the development of immersion lithography machine in 2016.
2- I have seen patents on immersion lithography filled out by QIER ELECTROMECHANICAL in 2019, that means they already have hardware.
3- I have seen the resumes of the people who work on the machine indicating that they are working on immersion lithography for the company that is working with SMEE.
4-The company that makes the optics has stated that they are working on a 28nm lithography at the Nankai University Student Career Center, which in my opinion is more official than any news source.
Changchun National Science Precision Optical Technology Co., Ltd. (Optical country looking for it to be completed wholly-owned acquisitions during the year ). Team developed China's first set of 90 nm node ArF projection aligner exposure optics system was 2016 Nian successfully delivered to the user, this achievement marking China's ultra-precision optical technology has been fully form and among the international advanced level. Currently , the team assumed 02 special two core mission - for the 28 nm node ArF immersion lithography optical system R & D exposure and technological progress and smoothly ; at the same time , the undertaking of 110The product research and development work of the exposure optical system of the nm node KrF shadow lithography machine is nearing completion. Two sets of product prototypes will be delivered to users within this year , and the market prospect is good .
5- Both RS-LASER and U-precision in 2018-2019 announced breakthroughs in parts that are absolutely necessary to make an advanced lithography machine, the dual wafer stage with an overlay error no more than a few nanometers and a high powered Arf light source.
6-There is a sense of urgency to have the machine working a soon as possible, Huawei Hubble investment not only invested in SMEE but also in the shell companies supplying SMEE. SMIC is also pretty desperate because they don't know if they are gonna get cut off from accessing Arfi machines from ASML and they also have make investments in SMEE.
And there is even more "official" information out there than just news sources but when you fill the variables into the equation the result is undeniable, they are working in a very advance immersion lithography machine. The question is how good will be and when is gonna be delivered? I hope as soon as possible and that a least give Huawei the capabilities of making advance chips on their own.