New company formed for EUV LPP laser. source at Shanghai, shenguang laser.
It's not EUV light source but the laser used to produce EUV light source. Still need someone else to do the EUV generation vessel.
EUV光源研发企业 上海神光激光
上海先进激光产业创新技术研发与转化功能型平台建设推进会暨上海神光激光技术制造装备研发有限公司揭牌仪式在上海嘉定工业区举行。
这是上海市激光技术研究所联合中国科学院上海光学精密机械研究所（中科院光机所）、上海集成电路研发中心有限公司、上海嘉定工业区开发（集团）有限公司等，致力于先进激光产业关键共性技术研发，瞄准半导体集成电路的先进激光光源自主可控，解决制约集成电路等高端装备产业发展的瓶颈问题，支撑上海和长三角地区产业辐射和发展的一项重要举措。
此次四家单位注资成立公司，以院地合作的模式，通过政府先导性投入、地方政府空间承载，发挥资源整合、优势互补的作用，合力推动激光技术研发与成果转化。
一方面，该平台将加快关键核心技术的突破，构建完善的创新产业链，输出产业技术，另一方面，培育龙头企业，形成上海激光产业技术创新谷，孵化企业20家以上，培育打造激光领域的独角兽企业，10到15年内产值规模争取达到100个亿，辐射长三角，带动相关产业规模1000亿以上。再一方面，打造区域性的集成电路产业人才高地，集聚全球高端人才，初期研发团队20人，两年内形成100人左右的团队规模，五年内达到200人。
据文汇网报道，未来，平台将逐步攻克超短脉冲激光、准分子激光和EUV光刻光源。运用于半导体集成电路领域激光装备技术研发、高端智能制造装备技术研发、高端激光医疗装备技术研发、智能探测激光装备技术研发等领域。
The Shanghai Advanced Laser Industry Innovation Technology R&D and Transformation Functional Platform Construction Promotion Conference and the unveiling ceremony of Shanghai Shenguang Laser Technology Manufacturing Equipment R&D Co., Ltd. were held in Shanghai Jiading Industrial Zone. This is Shanghai Institute of Laser Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (Institute of Optics and Mechanics, Chinese Academy of Sciences), Shanghai Integrated Circuit R&D Center Co., Ltd., Shanghai Jiading Industrial Zone Development (Group) Co., Ltd., etc., dedicated to the key to advanced laser industry Generic technology research and development, aiming at the independent control of the advanced laser light source of semiconductor integrated circuits, solving the bottleneck problem restricting the development of high-end equipment industries such as integrated circuits, and supporting the industrial radiation and development of Shanghai and the Yangtze River Delta region.
This time, the four units injected capital to establish the company, using the model of cooperation between the hospital and the local government, through the government's pilot investment and local government space, to play the role of resource integration and complementary advantages, and jointly promote the research and development of laser technology and the transformation of results. On the one hand, the platform will accelerate the breakthrough of key core technologies, build a complete innovation industry chain, and export industrial technology. On the other hand, it will cultivate leading enterprises and form the Shanghai Laser Industry Technology Innovation Valley, incubate more than 20 enterprises, and cultivate and build the laser field. The unicorn enterprises of China will strive to reach 10 billion yuan in output value within 10 to 15 years, radiate the Yangtze River Delta, and drive the scale of related industries to more than 100 billion yuan. On the other hand, to create a regional integrated circuit industry talent highland, gather high-end talents from around the world, the initial R&D team will be 20 people, and a team of about 100 people will be formed within two years, and it will reach 200 people within five years. According to Wenhui.com, in the future, the platform will gradually overcome ultrashort pulse lasers, excimer lasers and EUV lithography light sources. Used in the field of semiconductor integrated circuit laser equipment technology research and development, high-end intelligent manufacturing equipment technology research and development, high-end laser medical equipment technology research and development, intelligent detection laser equipment technology research and development and other fields
It's not EUV light source but the laser used to produce EUV light source. Still need someone else to do the EUV generation vessel.
EUV光源研发企业 上海神光激光
上海先进激光产业创新技术研发与转化功能型平台建设推进会暨上海神光激光技术制造装备研发有限公司揭牌仪式在上海嘉定工业区举行。
这是上海市激光技术研究所联合中国科学院上海光学精密机械研究所（中科院光机所）、上海集成电路研发中心有限公司、上海嘉定工业区开发（集团）有限公司等，致力于先进激光产业关键共性技术研发，瞄准半导体集成电路的先进激光光源自主可控，解决制约集成电路等高端装备产业发展的瓶颈问题，支撑上海和长三角地区产业辐射和发展的一项重要举措。
此次四家单位注资成立公司，以院地合作的模式，通过政府先导性投入、地方政府空间承载，发挥资源整合、优势互补的作用，合力推动激光技术研发与成果转化。
一方面，该平台将加快关键核心技术的突破，构建完善的创新产业链，输出产业技术，另一方面，培育龙头企业，形成上海激光产业技术创新谷，孵化企业20家以上，培育打造激光领域的独角兽企业，10到15年内产值规模争取达到100个亿，辐射长三角，带动相关产业规模1000亿以上。再一方面，打造区域性的集成电路产业人才高地，集聚全球高端人才，初期研发团队20人，两年内形成100人左右的团队规模，五年内达到200人。
据文汇网报道，未来，平台将逐步攻克超短脉冲激光、准分子激光和EUV光刻光源。运用于半导体集成电路领域激光装备技术研发、高端智能制造装备技术研发、高端激光医疗装备技术研发、智能探测激光装备技术研发等领域。
The Shanghai Advanced Laser Industry Innovation Technology R&D and Transformation Functional Platform Construction Promotion Conference and the unveiling ceremony of Shanghai Shenguang Laser Technology Manufacturing Equipment R&D Co., Ltd. were held in Shanghai Jiading Industrial Zone. This is Shanghai Institute of Laser Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (Institute of Optics and Mechanics, Chinese Academy of Sciences), Shanghai Integrated Circuit R&D Center Co., Ltd., Shanghai Jiading Industrial Zone Development (Group) Co., Ltd., etc., dedicated to the key to advanced laser industry Generic technology research and development, aiming at the independent control of the advanced laser light source of semiconductor integrated circuits, solving the bottleneck problem restricting the development of high-end equipment industries such as integrated circuits, and supporting the industrial radiation and development of Shanghai and the Yangtze River Delta region.
This time, the four units injected capital to establish the company, using the model of cooperation between the hospital and the local government, through the government's pilot investment and local government space, to play the role of resource integration and complementary advantages, and jointly promote the research and development of laser technology and the transformation of results. On the one hand, the platform will accelerate the breakthrough of key core technologies, build a complete innovation industry chain, and export industrial technology. On the other hand, it will cultivate leading enterprises and form the Shanghai Laser Industry Technology Innovation Valley, incubate more than 20 enterprises, and cultivate and build the laser field. The unicorn enterprises of China will strive to reach 10 billion yuan in output value within 10 to 15 years, radiate the Yangtze River Delta, and drive the scale of related industries to more than 100 billion yuan. On the other hand, to create a regional integrated circuit industry talent highland, gather high-end talents from around the world, the initial R&D team will be 20 people, and a team of about 100 people will be formed within two years, and it will reach 200 people within five years. According to Wenhui.com, in the future, the platform will gradually overcome ultrashort pulse lasers, excimer lasers and EUV lithography light sources. Used in the field of semiconductor integrated circuit laser equipment technology research and development, high-end intelligent manufacturing equipment technology research and development, high-end laser medical equipment technology research and development, intelligent detection laser equipment technology research and development and other fields
