It's insane to see how many Deposition (PVD CVD ALD) companies are emerging from China right now!!! I can totally see AMAT and LAM going out of business in 5 years time frame, just like HTC or German photovoltaic companies.
Chinese semiconductor industry
- Thread starter Hendrik_2000
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Mirror and mask coating! Another piece of the EUV puzzle has been unveiled. This company makes ion sources, which are used in ion beam figuring machines to polish and deposit Mo/Si multilayer coating for EUV mirrors and masks. It looks like ion beam is the only method to polish EUV mirrors to their required precision.
Yeah China is not new in EUV mirrors technology.
Right, IBF capability is nothing new, but this is the first time I’m seeing domestic supplier of high performance DC and RF ion sources, which are key components in IBF tools.
This is really interesting. At the conclusion of this paper, it is written that
在极紫外光刻领域，尼康公司采用磁流变抛光技术、离子束抛光技术、在极紫外光刻领域，尼康公司采用磁流变抛光技术、离子束抛光技术、等离子体化学蒸发加工、弹性发射加工技术等技术的特定组合实现了全频段范围内超高精度的光学元件制造[68]。弹性发射加工技术具有在保持低频面形误差的同时提高中高频粗糙度的能力，采用离子束抛光修正低频面形误差、弹性发射加工技术提高中高频粗糙度的组合工艺路线已制造出低频面形误差、中频粗糙度和高频粗糙度分别为27 pm RMS，70 pm RMS，66 pm RMS的非球面镜
So Nikon used a combination of RMF, plasma, IBF and EEM to polish their EUV mirrors, whereas Zeiss together with ASML used RMF and IBF and made no mention of EEM according to this article.
It looks like EEM was developed in Japan and is mainly used by Japanese companies. Speaking of Nikon EUV, does anybody know what issues did Nikon encounter that prevented them from commercializing their EUV? They did build several working EUV prototypes.
where is the actual statement of CXMT .. ? anything from SCMP is completely garbage.
the word 'fear' is not in our dictionary.
This is the statement CXMT give to SCMP
"In a statement to the South China Morning Post on Wednesday, CXMT said" the paper “describes fundamental research related to DRAM structure and the feasibility of 4F2 design” and “it has nothing to do with CXMT’s current production processes”, suggesting that the design on paper is far from becoming a marketable product.
“Any accusation that CXMT is violating US sanctions or export controls is completely inaccurate,” the company’s export control experts said. “We firmly believe that the free flow of ideas that IEDM seeks to foster is essential for the industry’s innovation and development.”
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