I'm not sure you've explained that well. A 22nm single pass machine is what SMIC is using for 7nm from my understanding. It does this with multiple passes and masks.
I think what your saying is a machine like the 1980i which is single pass of 28nm couldn't make a 7nm chip, but a 2050i could do 28nm.
But it's confusing because lithography machines ratings and what they're capable of isn't a simple 1:1 like your comment implied.
A NXT1950 is a 28nm rated scanner. It can handle only the most critical layer of 28nm, but can’t handle the most critical layer of 7nm.
A NXT2000 is a 7nm rated scanner because it is capable of handling the most critical layer of 7nm process. A NXT2000 can be used for 7nm and 28nm.
what I’m saying is, if a scanner is capable of doing 28nm AND 7nm, we would’ve call it a 7nm litho tool.
So when SMEE SSA800, the so called 28nm litho scanner, it’s exactly that, a 28nm scanner. If it’s intended to have all the bells and whistle to handle 7nm, they would’ve called it a 7nm scanner instead of calling it a 28nm scanner. My main point is there are quite a big difference between the so called 28nm scanner vs 7nm scanner.
It’s not only about resolution limit or how many litho passes. If that’s the case NXT1950 and NXT2000 could be used interchangeably…both have same resolution capability on paper and both could be used for multiple litho pass.
the thing is people here think it’s all about the resolution so double patterning with NXT1950 is the same as double patterning in NXT2000. But it’s not that simple. And “I did not explain it well” because I didn’t explain the details at all. I merely pointed out 28nm vs 7nm scanners are not the same.
and scanner model to node rating IS that simple 1:1. With each more advanced nodes comes tighter specification in order to reach satisfactory yield, each progressive model was designed with features and capabilities to fulfill each node’s requirement. So it is indeed really that simple of 1:1 scanner model to node.