I have got a question. Since nowadays all these node process 28nm 14nm 7nm 5nm 3nm etc, are just trademark name,rather than actual physical dimension. How does it play into US export restriction rules?I mean,a fab can make chip with transistor density equivalent to TSMC 7nm, but call it 28nm, thus able to import required equipment?
The logic node naming were pretty consistent with the planar nodes (non-FinFET) with each node comparison with the size of litho cell (Contacted Poly Pitch and Minimum Metal Pitch shrinking at ~70% node to node. Basically the node naming convention, CPP and MPP all shrink by around 70% from node to node. Hence full nodes of 65nm, 45nm, 32nm, 20nm, 14nm, 10nm, 7nm, 5nm, 3nm, 2nm….all shrink of 70% node to node).
he divergence of node naming didn’t start to happen until 16nm node. More specifically, it’s only Intel that insist on staying true to the old node naming convention. The node naming difference within the foundries are much smaller. The introduction of DTCO where different techniques to reduce cell height and cell width started at 16nm. Everyone started adopting different combination of DTCO resulting in it being more difficult to benchmark them with just the node naming convention. Most folks in the industry aren’t able to verbalize the difference between nodes of major fabs, even most of litho engineers in charge of production may not able to tell what their competition is doing. This is why there’s so much confusion and articles that can’t clearly articulate this clearly. Semiwiki has pretty good data on the actual feature dimension and DTCO technique used on a per fab basis; it’s not exact but pretty close. By the way,
@tonyget, I see you are fairly active on semiwiki discussions.
With that said, the BIS export restriction last October was a bit vague but they addressed that with the updated restriction last month. The restriction is now refined to cover logic nodes that are non-planar, which covers all process nodes with finFET. But if somehow someone decide to game their rules more with planar node with transistor density close to a “traditional” 16nm, I’m sure BIS would
In DRAM, the naming divergence started around D2L (there’s two nodes in the 20ish nm node; D2L refer the lower of the two). For DRAM BIS this past month specified the 18nm cut-off is defined as what the “F” dimension of 6F^2 DRAM cell would be. Basically take the product of bitline pitch and wordline pitch to be cell area 6F^2; then it’s simple arithmetic to determine what “F” would be.
For 3D-NAND it’s fairly straight forward by simple count of the number of “wordline” layers (or level).
But if somehow someone decide to game their rules more with planar node with transistor density close to a “traditional” 16nm, I’m sure BIS would refine the definition to using a definition transistor density. And for DRAM, there’s already effort to adopt 3D-DRAM, capacitor less DRAM, or 4F2 DRAM; if and when that happen, a simple rule change to use bit density would come into play.