Do these more sophisticated mature node processes require different equipment from less complicated ones, or just better process knowledge?SMIC adding capacity mostly in 28/40/55nm segment right now, because there is plenty of demand from domestic customers as supply chains change
it definitely requires different tools, I believe SMIC said 80% of process is the same, which keeps cost downDo these more sophisticated mature node processes require different equipment from less complicated ones, or just better process knowledge?
there's a few process node breakpoints where process chemistry changes such as poly-Si gate metal to metal gate conductor, oxide gate dielectric to high-k gate dielectric, going from planar to finFET, etc.Do these more sophisticated mature node processes require different equipment from less complicated ones, or just better process knowledge?