Chinese semiconductor industry

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Alb

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This paper backed up what I stated earlier. Note this paper mentions 'defect detectability' and alogorithm that supports said defect detection. No mention of false positive detection. This is typical of anyone trying to break into this space. Had to figure out the detection capability of defects amongst the smaller design feature/patterns first. But once they achieve the detection sensitivity requirement, thee real/false detection issue would become the main impediment towards acceptance and adoption by the fabs for HVM.
Apart from metrology and inspection do you think that the other US tools from Lam and AMAT in an advanced fab (7nm) can be replaced by domestic + non American equipments?
 

tokenanalyst

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easier said than done. you don't see people rushing to buy Jincee inspection tools to replace KLA for 14nm...7nm.
Who knows where pmish-tech and SMIC really are, who knows if they are validating their tools for 14 and 7nm, they have been selling 28nm for many years and tools that work for olders process nodes can be validated for more advanced process nodes, is not one size fit all. There a lot of things that are happening in the Chinese semiconductor industry that is not known to the public, especially regarding the ultrasensitive issue Huawei and SMIC. Like a black hole I can only deduce is black hole by seeing things that are happening around it.

On 'normal' runs, where manageable number of false are captured, KLA has better auto-classification software that had been refined over the years with our (end user) input. User friendly features or customized features tailor to each specific fabs are not something new challenger SME would know about nor had come up with already. I would say, this is a big reason why we don't switch out from KLA even though we want a second supplier to keep KLA honest. Basically, I had not seen tools that beat KLA enough for it to make sense for us to adopt as a second vendor or to replace KLA outright.
What if KLA can't deliver their tools to your lab, have your lab closed? or find a close enough replacement to KLA? I bet that your lab would have picked the second option and maybe your lab would have found that that others tool can do a good job after a learning curve. Because sometimes tool bias exist, some people in China didn't like to use Chinese made tools not because they were bad but because the other tools are just easier to use with a much lower learning curve.
 

tonyget

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In bright-field pattern defect inspection Chinese companies (Jingce) are capable of 65nm only at the moment. There are more advanced models in the R&D phases. I think this the main bottleneck. I know Nextin cover this type of equipment and they seem to be quite advanced, that's why I was asking the question in the first place.

Tztek acquired German firm Muetec,which has bright-field pattern defect inspection products covers up to 28nm

采用参股方式布局量检测业务的公司主要有天准科技和赛腾股份。天准科技于2020年收购德国主营晶圆高精度光学检测和量测设备的公司 Muetec,Muetec的客户包括国际主流半导体厂商,覆盖欧洲、中国、美国、日本、东南亚等区域。2021 年公司完成收购 Muetec100%股权,在此基础上积极推进 Muetec 产品线技术升级,以覆盖 55nm、28nm 等工艺节点。赛腾股份于 2019 年收购日本主营半导体检查与曝光设备的公司 Optima,Optima 的主要产品为晶圆缺陷检测设备,现已覆盖三星、台积电、沪硅产业等国内外一线客户。截至 2021 年底,公司顺利实现 Optima 的中日两地协同运营并在国内晶圆产能大幅扩张的背景下迅速拓展国内市场。

Companies that use equity participation to lay out volume testing business mainly include Tianzhun Technology and Saiteng. In 2020, TZN Technology acquired Muetec, a German company specializing in high-precision optical inspection and measurement equipment for wafers. Muetec's customers include international mainstream semiconductor manufacturers, covering Europe, China, the United States, Japan, Southeast Asia and other regions. In 2021, the company completed the acquisition of 100% equity of Muetec. On this basis, it will actively promote the technological upgrade of Muetec's product line to cover process nodes such as 55nm and 28nm. Saiteng acquired Optima, a Japanese company specializing in semiconductor inspection and exposure equipment, in 2019. Optima's main product is wafer defect inspection equipment, which now covers domestic and foreign first-line customers such as Samsung, TSMC, and Shanghai Silicon Industry. As of the end of 2021, the company has successfully realized the coordinated operation of Optima in China and Japan and has rapidly expanded the domestic market against the background of the substantial expansion of domestic wafer production capacity.

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tokenanalyst

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This paper backed up what I stated earlier. Note this paper mentions 'defect detectability' and alogorithm that supports said defect detection. No mention of false positive detection. This is typical of anyone trying to break into this space. Had to figure out the detection capability of defects amongst the smaller design feature/patterns first. But once they achieve the detection sensitivity requirement, thee real/false detection issue would become the main impediment towards acceptance and adoption by the fabs for HVM.
I know that the same institution who funded Jingce has been worked a lot in AI algorithms and machine learning for this purpose.

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again who knows where they are right now.
 

sunnymaxi

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This is why SMIC 14nm & 7nm capacity had been stuck at the same pre-Oct 7th sanction level....no change for a year now. This doesn't sound like domestic tools is making headway at 14nm/7nm, does it?
sir, SMIC Shanghai line is currently expanding. this is confirmed information.

but the question is, from where SMIC will get Non-litho tools for higher nodes.. ?
 

hvpc

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Who knows where pmish-tech and SMIC really are, who knows if they are validating their tools for 14 and 7nm, they have been selling 28nm for many years and tools that work for olders process nodes can be validated for more advanced process nodes, is not one size fit all. There a lot of things that are happening in the Chinese semiconductor industry that is not known to the public, especially regarding the ultrasensitive issue Huawei and SMIC. Like a black hole I can only deduce is black hole by seeing things that are happening around it.
It's my business to know. I'd like to think I know a little bit about what's going on at my customer's fab. I just usually don't say anything or share basic info. I think I had already 'said' too much today. You can chose to consider what I shared as another piece of info or dismiss it all together and go back to your existing way of working by deducing a black hole's existence through patents, technical paper, and media news.

What if KLA can't deliver their tools to your lab, have your lab closed? or find a close enough replacement to KLA? I bet that your lab would have picked the second option and maybe your lab would have found that that others tool can do a good job after a learning curve. Because sometimes tool bias exist, some people in China didn't like to use Chinese made tools not because they were bad but because the other tools are just easier to use with a much lower learning curve.
If KLA can't deliver, the fabs could just halt any expansion and just work with what American tools they already have. And this is clearly what's happening.
Multiple advanced fabs have more scanner capacity than they could utilize. If alternative to American tools is available, no fabs in the right mind would leave the most expensive piece of equipment sitting in crates or in the cleanroom unutilized.
 

tonyget

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One major upgrade on the NXT2000 is a more robust alignment sensor to deal with 7nm HVM requirement. NXT1980 can't handle the most critical layers on 7nm node, period.

Is that a software update or hardware update?

I recall there was rumor that Huawei bought some second hand Nikon lithography machine,then replaced the laser interferometer on the machine with better one to improve the precision. If that was true,couldn't they do the same with ASML machines?
 

tokenanalyst

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It's my business to know. I'd like to think I know a little bit about what's going on at my customer's fab. I just usually don't say anything or share basic info. I think I had already 'said' too much today. You can chose to consider what I shared as another piece of info or dismiss it all together and go back to your existing way of working by deducing a black hole's existence through patents, technical paper, and media news.
I do agree that you provide good information and I not disputing that, but I don't think you have access to sensible parts of the Chinese semiconductors industry, especially of companies that are avoiding any scrutiny and much much less if you are not mainland Chinese.
 

hvpc

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Apart from metrology and inspection do you think that the other US tools from Lam and AMAT in an advanced fab (7nm) can be replaced by domestic + non American equipments?
Of course they can be replaced, eventually. I only know what I see and hear of what's happening at fabs. They are working on qualifying a complete domestic 28nm non-litho line now....not at the 7nm level yet. If all goes well, 28nm this year, 14nm next year, then 7nm.
domestic replacement for 7nm American equipment will not happen this year.
sir, SMIC Shanghai line is currently expanding. this is confirmed information.

but the question is, from where SMIC will get Non-litho tools for higher nodes.. ?
they will not expand capacity output. advanced scanners will sit in crates until domestic advanced process tools are ready. now, they are just hoarding advanced scanners while they still can.
Is that a software update or hardware update?
hardware
I recall there was rumor that Huawei bought some second hand Nikon lithography machine,then replaced the laser interferometer on the machine with better one to improve the precision. If that was true,couldn't they do the same with ASML machines?
rumors.
 
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tokenanalyst

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With a total investment of 320 million yuan, the "Advanced Semiconductor Electronic Application Materials Project" has been put into production.​

the advanced semiconductor electronic application materials project invested by Yiyihe Semiconductor Materials Co., Ltd. was put into production.
Riyihe Semiconductor Materials Co., Ltd. is a wholly-owned subsidiary invested and established by Riyihe Chemical (Suzhou) Co., Ltd. in Hefei Xinzhan High-tech Zone. The project, with a total investment of 320 million yuan, is mainly engaged in the production of developers, etching fluids, cleaning fluids, grinding fluids and other products for semiconductor wafer manufacturing and packaging.
According to news from Hefei Xinzhan District, in recent years, Xinzhan High-tech Zone has focused on the "core screen automotive integration" industry positioning, focusing on the layout of BOE's 6th generation line, 8.5th generation line, 10.5th generation line, Visionox OLED flexible display, Jinghe 12-inch With key projects such as wafer manufacturing, Qizhong packaging and testing, and Guoxuan Hi-Tech power batteries, the integrated circuit industry chain has developed rapidly, gradually forming a complete industrial ecosystem from upstream design, materials and equipment, to core manufacturing, as well as downstream packaging and testing, and public service platforms
 
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