Recent progress in InGaZnO FETs for high-density 2T0C DRAM applications
Shengzhe YAN1,2, Zhaori CONG1,2, Nianduan LU1 , Jinshan YUE1* & Qing LUO1 1 Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China; 2University of Chinese Academy of Sciences, Beijing 100049, China Received 1 February 2023/Revised 29 March 2023/Accepted 9 June 2023/Published online 21 September 2023
Abstract:
In the past several decades, the density and performance of transistors in a single chip have been increasing based on Moore’s Law. However, the slowdown of feature size reduction and memory wall in the von Neumann architecture restrict the improvement of system performance and energy efficiency. Thus the requirements of the emerging big data and artificial intelligence applications cannot be met. To address this issue, novel devices and architectures are being explored. Among them, the InGaZnO (IGZO) fieldeffect transistor (FET) device and the computing-in-memory (CIM) architecture can be possible solutions for high-density, high-performance, and high-efficiency applications. Herein, we review the recent progress in IGZO-based FETs for dynamic random access memory (DRAM) applications. The mechanism of IGZO FETs, compact modeling of IGZO transistors, progress of IGZO manufacturing process, IGZO circuit design, and IGZO-based CIM and 3D integration architectures are presented. Furthermore, the challenges and future trends of IGZO research are discussed.
View attachment 119152
View attachment 119153