Shengmei Shanghai: Currently, two ALD products have entered client verification
Shengmei Shanghai disclosed the latest research minutes saying that ALD is indeed a trend in future technological development. In particular, the company pays more attention to furnace tube ALD, mainly because of its large output and can produce at least 50 or 100 pieces at the same time. Even more, the craft is broader. However, the difficulty is also relatively high, mainly because it is difficult to control uniformity and chemical carriers. ALD is widely used in storage, advanced manufacturing processes, etc. At present, the company has two products that have entered client verification.
In the future, the company will compete in the market through differentiated technical products. For example, in terms of furnace tubes, the company has a special furnace tube design to improve ALD in terms of uniformity, granularity and usage efficiency. While the company's ALD products continue to expand the domestic market, it also attaches great importance to the international market. It hopes to introduce the company's differentiated furnace tube ALD technology to foreign customers, so the company is doing it both at home and abroad.
Regarding cleaning equipment, Shengmei Shanghai said that three years ago, the company's cleaning equipment mainly focused on single-chip equipment. In recent years, as the company has continued to invest in research and development of trough equipment, the company's trough equipment has basically achieved full process coverage at this stage, including cleaning, degumming and some more advanced trough equipment for 3D packaging.
He further pointed out that in the future, the company will maintain two-way development and develop supercritical CO2 drying and cleaning while expanding single-chip equipment. This technology is currently owned by only three companies in the world, and the company has independent IP and unique technology that can save 40% of CO2 usage. In the future, the company will promote this equipment to the domestic and international markets, especially CO2 drying and company mega. The combination of sonic cleaning equipment can clean small structures without damaging them and dry them at the same time.
The Track device was launched at the end of last year and is currently making good progress. However, since it is the first device, there are some common problems in the early verification process. The Shengmei Shanghai team is actively working with customers and cooperative manufacturers to solve these problems.
In terms of PECVD equipment, Shengmei Shanghai has also made a lot of progress in joint research and development with clients, and some basic problems have been solved. He said that the company will consider two types of customers in the future, one is logic circuits and the other is storage. At the same time, the company's PECVD equipment has a characteristic that is different from the world's first-class equipment structure. Therefore, in the future, the company will use the company's differentiated technology in PECVD to meet the higher requirements of customers and achieve a balance in uniformity, granularity, film stress and output
Regarding the company's Lingang project, Shengmei Shanghai said it is currently divided into two parts. The first production plant is currently the focus and should be put into trial production before the year. The project will be fully constructed by the end of the year, including the R&D laboratory, second production plant, etc., which will be put into use one after another.
In addition, a R&D clean room will be renovated this year and is expected to be put into use in the first quarter of next year. In this way, the company will have a clean room of the same level as the client, which will greatly improve the company's R&D conditions. Some new products and improved technologies can be sent to clients after verification by the company, and the progress of research and development will be greatly enhanced.