Apparently it does go by process node CD
拓荆科技是目前国内唯一产业化应用集成电路PECVD 和SACVD 设备的厂商,也是国内领先的ALD 设备厂商。公司是国内半导体CVD 设备龙头,主要产品包括等离子体增强化学气相沉积(PECVD)设备、原子层沉积(ALD)设备和次常压化学气相沉积(SACVD)设备三个产品系列,是国内唯一产业化应用集成电路PECVD 和SACVD 设备的厂商,也是国内领先的ALD 设备厂商,
已配适180-14nm 逻辑芯片、19/17nm DRAM 及64/128 层FLASH 制造工艺需求,广泛应用于中芯国际、华虹集团、长江存储、长鑫存储、厦门联芯、燕东微电子等国内主流晶圆厂产线,打破了国际厂商对国内市场的垄断。2021 年公司实现营业收入7.58 亿元,其中PECVD/SACVD/ALD 设备收入分别为6.75/0.41/0.29 亿元,营收占比分别为89.1%/5.4%/3.8%。
公司PECVD 领先优势明显,ALD 和SACVD 将成为新的增长点。薄膜沉积设备作为晶圆制造的三大主设备之一,2020 年其投资规模占晶圆制造设备总投资的25%,仅次于刻蚀设备,其中PECVD、ALD 和SACVD 在薄膜沉积设备市场份额占比分别为33%、11%和小于6%,PECVD 设备占比最大。公司主要产品为PECVD、ALD 和SACVD,卡位优势明显。
其中PECVD 设备在28nm 及以上制程逻辑产线基本可以实现各类薄膜工艺的覆盖,14nm 先进制程节点在验证中;PEALD 设备可以覆盖逻辑芯片55-14nm SADP、STI 工艺及存储领域,已实现产业化应用,ThermalALD 主要应用于28nm 以下制程逻辑芯片,正在研发中;SACVD 设备可以覆盖12 英寸40/28nm 以及8 英寸90nm 以上的逻辑芯片制造工艺需求。未来ALD 和SACVD 将逐步进入放量期,有望成为公司新的增长点。
Tuojing Technology is currently the only manufacturer of PECVD and SACVD equipment for industrialized application integrated circuits in China, and is also a leading ALD equipment manufacturer in China. The company is a leader in semiconductor CVD equipment in China. Its main products include plasma-enhanced chemical vapor deposition (PECVD) equipment, atomic layer deposition (ALD) equipment and sub-atmospheric chemical vapor deposition (SACVD) equipment. It is the only domestic industrialized A manufacturer of PECVD and SACVD equipment for applied integrated circuits, and a leading ALD equipment manufacturer in China.
It has been adapted to the manufacturing process requirements of 180-14nm logic chips, 19/17nm DRAM and 64/128-layer FLASH, and is widely used in SMIC, Hua Hong The production lines of domestic mainstream fabs such as Group, Yangtze River Storage, Changxin Storage, Xiamen Lianxin, and Yandong Microelectronics have broken the monopoly of international manufacturers on the domestic market. In 2021, the company will achieve operating income of 758 million yuan, of which PECVD/SACVD/ALD equipment revenue will be 6.75/0.41/0.29 billion yuan, accounting for 89.1%/5.4%/3.8% of revenue.
The company has obvious leading advantages in PECVD, and ALD and SACVD will become new growth points. Thin film deposition equipment is one of the three main equipments for wafer manufacturing. Its investment scale accounts for 25% of the total investment in wafer manufacturing equipment in 2020, second only to etching equipment. Among them, PECVD, ALD and SACVD have the largest market share of thin film deposition equipment The proportions are 33%, 11% and less than 6% respectively, and PECVD equipment accounts for the largest proportion. The company's main products are PECVD, ALD and SACVD, with obvious card position advantages. Among them,
PECVD equipment can basically realize the coverage of various thin film processes in the logic production line of 28nm and above processes, and the 14nm advanced process node is under verification; PEALD equipment can cover logic chip 55-14nm SADP, STI process and storage fields, and has achieved industrialization Application, ThermalALD is mainly used in logic chips with processes below 28nm and is under development; SACVD equipment can cover the manufacturing process requirements of 12-inch 40/28nm and 8-inch logic chips above 90nm. In the future, ALD and SACVD will gradually enter the heavy-duty period and are expected to become new growth points for the company.