From internet. Luckily Dutch government didn't ban the 1980i.
产能远远不够,
一条2万片月产能的线,需要8台湿式DUV,6台ARF干式DUV,1台KRF
一条1万片月产能的线,需要4台湿式DUV,3台ARF干式DUV,1台KRF
现在新厂一般是10万片月产能起步,需要80台湿式DUV,60台干式DUV,10台KRF。
The production capacity is far from enough,
A line with a monthly production capacity of 20,000 pieces requires 8 wet DUVs, 6 ARF dry DUVs, and 1 KRF
A line with a monthly production capacity of 10,000 pieces requires 4 wet DUVs, 3 ARF dry DUVs, and 1 KRF
Now a new factory generally starts with a monthly production capacity of 100,000 pieces, requiring 80 wet DUVs, 60 dry DUVs, and 10 KRFs.
No Fabs need that many lithography machines. A mid tier ASML machine has over 200 wph thuoughput,200x24x30=144000 w/month. Even consider multi-layer on wafer and redundancy,10 DUV is quite sufficient for a 100k/month capacity fab