havok：60W工程样机阶段，科益现在一年能产10台左右准分子激光器（包括干式和浸没），等亦庄的基地建好后产能会大幅提高，亦庄基地目前还未开工（从开工到达产大约要3年时间）
havok：At the 60W engineering prototype stage, Keyi can now produce about 10 excimer lasers (including dry and immersion) a year. After the Yizhuang base is completed, the production capacity will be greatly increased. The Yizhuang base has not yet started (from the start to production about takes 3 years)
View attachment 107486
A lot of juicy info today!
Regarding RSLaser capacity of 10 pieces/year until a still not started plant with 3-years ETA will be ready, well it seems a bit too odd.
I'd guess that if there will be the need they will increase production anyhow. Thy don't need a fancy new plant for this. Thy can rent an already existing plant and move equipment in, or even outsource it to some big laser machinery manufacturer (there are many in China). If China really needs localized litho machines, they cannot be the bottleneck for 3 years time just because they have to build their shiny new plant. This is impossible and unacceptable.
Important information from Havok，they already have a dual-working station prototype for EUV
havok：EUV真空双工件台已有样机而且和ASML一样，很大且采用多轴激光干涉仪
havok：The prototype of the EUV vacuum double workpiece table has been prototyped and, like ASML, it is very large and uses a multi-axis laser interferometer.
Well, few weeks ago he said project was stalled because of lacking of funds...now they have a prototype...oh well!
tonyget：上光所是外购CO2激光源，然后自己做锡滴轰击的部分？还是包括CO2激光源在内都自己做？
havok：自己不做，CO2激光华中科大在做
tonyget：Is SIOM outsourcing the CO2 laser source, and then doing the part of tin droplet bombardment? Or they do all the work themself？
havok：SIOM doesn't do CO2 laser source, HUST is doing it
View attachment 107488
Now we know who is developing the EUV project. Maybe a bit surprising (but not so much) that DUV and EUV projects are splitted and many actors who are developing DUV (RSLaser, etc) are not involved with EUV.
