A few days ago, Korean media reported that SK Hynix had some quality problems in the DRAM chip production process this month.
It is reported that the main cause of the DRAM wafer production process problem is the quality problem of the high-k value zirconium-based film material provided by SK trichem.
Due to impurities in the materials supplied by SK Trichem, production of several SK Hynix-related production equipment was temporarily suspended. SK Hynix said: "Immediately took measures such as cleaning operations and did not cause production loss." However, it is reported that SK is studying compensation for equipment stoppage and replacement of parts in accordance with the terms of the contract.
It is reported that SK Hynix has suspended the material procurement of SK Trichem until the problem is resolved. In this regard, SK Trichem explained: "There was a problem with the purity of the material supplied to SK Hynix, which caused an increase in the pressure of some equipment in the process, causing (equipment) to stop operating." He said. The procurement of materials for some production lines that have problems has been reduced, and it is planned to start supplying higher quality products from the end of this month. "
According to the editor's understanding, the high-k value zirconium-based materials supplied by SK Trichem are crucial to the production of DRAM.
Since the main issue affecting DRAM process scaling is capacitance, in order to store data reliably, capacitance needs to be greater than a certain threshold. To continue to manufacture capacitors that occupy a smaller area, the capacitor can be made higher, the film thinner, or the K value of the film can be increased. But the problem is that although taller and thinner capacitors can be reliably made from the perspective of mechanical stability, as the film thickness decreases, the leakage will increase, and as the film K value increases, the band gap will also decrease. Will cause leakage problems. The current standard is to use a composite film consisting of an aluminum-based oxide film for low leakage and a zirconium-based film for high-k values. DRAM is deposited atomically thin on the DRAM core element capacitor with a high-potassium preconditioner. DRAM distinguishes between 0s and 1s by whether or not it stores charge in a capacitor. The narrower the line width, in order to solve the interference problem between capacitors, it is necessary to deposit high potassium substances with higher heritability. Therefore, high-K substances are the core materials that have an important impact on the production and operation of DRAM
According to the editor of EDN, SK Trichem is a material affiliated company of SK Group, which is a joint venture between SK Materials and Japan's Trichem Research Institute (TCLC). In 2021, the holding business unit of SK Materials will be absorbed into SK and become a subsidiary of SK. SK Corp. has a 65 percent stake and TCLC has a 35 percent stake.
SK Trichem achieved annual sales of 150 billion won for two consecutive years in 2020 and 2021, but sales are expected to exceed 200 billion won last year as supplies to SK Hynix increase.