Shengmei Shanghai: PECVD of various films will be launched this year, and will be verified on the client side
Jiweiwang news, recently, Shengmei Shanghai said in an agency survey that our PECVD can cover storage and logic customers, and this year we will launch PECVD of various films and verify it on the client side. Some core components of PECVD come from overseas supply chains.
Shengmei Shanghai pointed out that some processes of PECVD take a long time, and some processes take a short time. We will design the number of chambers according to the specific process length of PECVD. Some films require many layers to be thicker, which takes a long time and requires more chambers. , the single layer is thinner, the time required is shorter, and the cavity is less. What we mainly do is to optimize the cost performance and meet the requirements of the client at the same time. The two jointly determine the cavity configuration. To add, the company's equipment will be used for most of the PECVD processes in the future.
Shengmei Shanghai said that it hopes to cooperate with multiple equipment and multiple customers this year, to verify the process in parallel, and to see the progress of cooperation with customers. If the cooperation goes well, I hope to cover 30% to 50%, and then continue to develop.
Regarding which components are more difficult to achieve localization, Shengmei Shanghai said that it is mainly some valves, such as vacuum valves, vacuum pumps, etc. These companies are also doing some work. In addition, the manipulator is also an important part. At present, this part is made by a core supplier in South Korea. In the future, the company will continue to develop and pursue diversification, and strive to have its own characteristics. Several companies are invited to do the core manipulators, and the commonly used manipulators can choose suppliers openly.
Regarding the localization of PECVD equipment, Shengmei Shanghai pointed out that at present, some imported parts are used, and domestic parts suppliers are also developing, and some domestic parts will gradually be tried. It will also be replaced with domestic products, but this requires a process. For those whose requirements are not too high, you can try to use domestic components. When domestic components are not fully capable of meeting the requirements, you will give priority to using imported ones.
According to Shengmei Shanghai, the equipment target corresponds to global customers, including domestic ones. At this stage, this device must be a domestic customer. In South Korea, the company has some R&D and production in South Korea, and the company has a history with Hynix. The company also hopes to enter its core process line as soon as possible by relying on differentiated technologies, but there is no guarantee that it will do so next year. In fact, customers all over the world need the best technology. If the company's differentiated solutions can interest customers, there is hope. At this stage, the company already has a patented layout and design background, and hopes to be recognized by international customers and enter international customers for verification as soon as possible.