I guess 1-2 years later Shanghai Xinyang will finish EUV photoresist researchBro, you are misleading everyone by trivializing the complexity behind building a production worthy lithography system.
What you said may be true for an engineering or alpha tool. Conquering the major modules that everyone is familiar with from plethora of ASML marketing slide is hardly enough to get the system into high volume manufacturing.
The devil is in the details. Details, which you called "passive" components, that ASML does not reveal to the public. Having worked with ASML to bring several scanners from development to production, I can tell you some of the subtle nuisances, functionalities is what differentiate ASML from Nikon & Canon.
We are no where near releasing a HVM ready domestic immersion or EUV system.
Even the wafer production ecosystem required to support EUV lithography is still a problem for China. Even if Chinese fabs have access to EUV system, the domestic EUV reticle process flow is no where near ready. And from what I see, there has been very little activity on this front domestically. Besides EUV photoresist, EUV reticle is also a problem.
Luwei Optoelectronics will take care of the EUV mask, in addition, Changchun Institute of Optics and Mechanics has most of the EUV technologies from masks to light sources.