Chinese semiconductor industry

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Jianguo

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ultra-precision grating positioning technology for lithography wafer table​


Summary
With high precision and high robustness, grating interferometers have become an important positioning device in advanced node lithography machines. Aiming at the positioning requirements of the lithography machine wafer table at 14 nm and below nodes, the development of homodyne and heterodyne grating interferometers with multi-degree-of-freedom nano/sub-nanometer measurement accuracy is reviewed, and the "four grating-four reading heads" is introduced. "The layout of the six-degree-of-freedom displacement measurement system for the lithography machine. In order to obtain higher accuracy and traceability, the environmental error, installation error and inherent error of the instrument in the grating interferometer are comprehensively analyzed, and the key issues for the realization of sub-nanometer measurement accuracy of the grating interferometer are proposed. Provides initial guidance for upgrading and system setup.
Abstract
Grating interferometers are becoming important positioning instruments in advanced node lithography machines owing to their high precision and robustness. To meet ultrahighly accurate positioning demands in the worktable of ≤14-nm node lithography machines, homodyne and heterodyne grating interferometry technologies and core systems with multidegree- of-freedom (multi-DOF) and nano/subnanometer metric accuracy were reviewed. Furthermore, a six-DOF positioning system in a current lithography machine enabled by an optimal configuration of “four gratings-four reading heads” was illustrated. Finally, errors in grating interferometers, including environmental error, installation error, and instrument inherent error were briefly discussed, and key challenges in error modeling, separation,and compensation were reviewed for achieving subnanometric accuracy and long-term accuracy stability. Hopefully, this study can provide preliminary guidelines for improving the accuracy and constructing various systems of grating​

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Is this still under research or close to commercialization? All indications were that China was stuck at the 14nm process, using domestic equipment, because they lacked domestic grating laser interferometry to replace their foreign supplier. This is a primary reason hindering progress beyond 14nm, using only core domestic equipment.
 

tokenanalyst

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Is this still under research or close to commercialization? All indications were that China was stuck at the 14nm process because lacked domestic grating laser interferometry to replace their foreign supplier. This is a primary reason hindering progress beyond 14nm, using only core domestic equipment.
The R&D of this technology ended in December 2021, also the develop of an high precision heterodyne interferometer was part of the project.
I don't know if Tsinghua is going to created a shell company in China to mass produce this kind of technology but they probably will. There are local interferometers companies in China, so they will have to work with them also.

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Jianguo

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The R&D of this technology ended in December 2021, also the develop of an high precision heterodyne interferometer was part of the project.
I don't know if Tsinghua is going to created a shell company in China to mass produce this kind of technology but they probably will. There are local interferometers companies in China, so they will have to work with them also.

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This is big news! There was talk of the US Commerce Dept preventing Zygo Corporation from selling more grating interferometers to China once they realized China was on the verge of breaking beyond 28nm process using domestic core equipment. I'm surprised this is already ready. If it is, it means domestic 7nm DUV process development is probably already happening now. It almost sounds like fake news.
 

european_guy

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This is big news! There was talk of the US Commerce Dept preventing Zygo Corporation from selling more grating interferometers to China once they realized China was on the verge of breaking beyond 28nm process using domestic core equipment. I'm surprised this is already ready. If it is, it means domestic 7nm DUV process development is probably already happening now. It almost sounds like fake news.

According to U-Precision response to inquiries on their IPO filing, Zygo interferometer is a concern:

"Yes. The dual stages interferometer supply source is Zygo, an American company. There is risk of supply being cut off. As there's no alternate domestic option, this is currently the biggest risk."

The transcript in Chinese has been translated by @hvpc here:


I am no expert, but I guess for such a sub-module U-Precision could just stockpile it while a localized version is developed.

We are at a point where US is mulling banning a sub-module (interferometer) of a sub-module (U-Precision stage movement) of the litho machine. US is really scraping the barrel here!

BTW we don't hear from @hvpc for a while, there were some harsh words flying after that he disappeared. It would be really a pity if he disappeared due to that.
 

ansy1968

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@european_guy bro I can't verify the authenticity BUT it's possible due to the urgency for both the Chinese customer and ASML as they race against the possible total ban the US is planning. It's on ASML priority list to ship all DUVL it can produce as an insurance. 23 units in the first quarter alone, IF we do the math within the year we may see 100 units ship.

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henrik

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@european_guy bro I can't verify the authenticity BUT it's possible due to the urgency for both the Chinese customer and ASML as they race against the possible total ban the US is planning. It's on ASML priority list to ship all DUVL it can produce as an insurance. 23 units in the first quarter alone, IF we do the math within the year we may see 100 units ship.

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They will continue to supply machines to China, as the yankees have no way of stopping them. ASML will not be sanctioned, as they are too dominant, Only the Chinese can displace asml.
 

ansy1968

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I now understand why Japan and EU want to invest in leading edge node like 3nm and 2nm, The reason the Chinese will be flooding the market with cheap low end chip, their industries can't compete thus the need to upgrade. BUT IF they all focus on leading edge will that affect their pricing as they compete against each other in this niche market?

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ansy1968

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They will continue to supply machines to China, as the yankees have no way of stopping them. ASML will not be sanctioned, as they are too dominant, Only the Chinese can displace asml.
bro the Damocles sword is hanging on them both, China welcomes ASML because thru competition can SMEE and CETC up their game. And the immediate concern is to supply Chips and produce them domestically with whatever means either foreign nor domestic.
 

henrik

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I now understand why Japan and EU want to invest in leading edge node like 3nm and 2nm, The reason the Chinese will be flooding the market with cheap low end chip, their industries can't compete thus the need to upgrade. BUT IF they all focus on leading edge will that affect their pricing as they compete against each other in this niche market?

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China will flood the market with 7nm, then 5nm and 3nm etc. Japan and the EU have no way of countering the Chinese expansion.
 

ansy1968

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Forget to post the article 3 days ago, so forgive me BUT the message is loud and clear, SMIC will continue its expansion plan and its growth potential even on todays trying time is immense.

In addition the expansion in Beijing, Shenzhen and others will be using domestic equipment except for SMIC SN2 FAB in Shanghai, here I think ASML latest DUVL NXT 2050i is being or had been installed.

SMIC to keep long-term capacity expansion plans unchanged​

Staff reporter, Shanghai; Willis Ke, DIGITIMES AsiaFriday 19 August 2022
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Credit: AFP

China's top foundry Semiconductor Manufacturing International Corp (SMIC) has decided not to change its long-term capacity expansion plans despite volatile market environments, sparking market concerns, according to industry sources.
With the rapidly spreading price falls and order cuts triggered by a sharp reversal in demand for consumer applications, many global foundries and IDMs are re-assessing whether to reduce or slow down their planned capacity expansions, the sources said.
But SMIC co-CEO Zhao Haijun has said at a recent international investors conference that the company will not alter its long-term capacity expansion plans and will maintain a consistent investment density in the years ahead, reasoning that SMIC is optimistic that domestic foundry business prospects will remain bright as localized chips production will continue to gain momentum.
Major PC chips vendors such as Intel and AMD have successively released pessimistic performance reports and business projections, warning that the IC industry may face a broader and more severe demand slowdown than expected. In response, Zhao said in the first half of 2022, the IC industry was affected by a double cycle overlap, generating panic and uncertainty in the markets, and some supply chain segments even suffered a quick business freeze.
Nevertheless, Zhao stressed the regionalization trend will remain unchanged worldwide, and SMIC remains optimistic about its business growth over the medium and long term, bolstered by the ever-growing localized chips production momentum in China.
Also braving market headwinds, China's top-2 foundry Hua Hong Semiconductor is proceeding with regular capacity expansions as well. Its president and executive director Tang Junjun has said that additional capacity at its 12-inch wafer fab in Wuxi, Jiangsu province will be commercialized in early 2023 when the plant's monthly capacity will increase to 95,000 wafers from 65,000. He also noted the company plans to build more fabs in the future, and the actual construction progress will hinge on delivery lead times for related equipment.
 
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