helo....Hi, @olalavn
What does "just acceptance test, to develop photoresist and immersion device" mean? Do you mean SMEE SSA800 will only used for acceptance testing of other equipment and to help with development of photoresist?
Any idea what the status of SMEE SSB800 & SSC800 is? thanks
SSB800 is dual stage iLine
SSC800 is dual stage KrF
but the China government doesn't approve it... SMEE has to redesign it... their light source system isn't up to standard....
SMEE is working on SSX800 series...i hope its immersion and photoresist perfect.