[Patent decryption] SMIC invented the transmission gate crystal structure memory scheme
[Jiaqin Comments] The memory solution with the transmission gate crystal structure invented by SMIC can make the channel current of the transmission gate transistor smaller than the channel of the pull-down transistor by controlling the length of the channel region of the transmission gate transistor. Therefore, it is beneficial to increase the ratio of the memory, thereby improving the read tolerance of the memory.
As a typical semiconductor device, static random access memory (SRAM) has been widely used in electronic devices such as computers, mobile phones, and digital cameras.
With the development of semiconductor technology, the preparation process of memory has become more and more mature, and the formed memory also has better performance. In actual production scenarios, some manufacturers use fin-effect transistors as transistor devices in memory. Although the fin field effect transistor is applied to the memory, it is beneficial to reduce the size of the memory and also improve the performance of the memory. However, the performance of the memory needs to be further optimized, such as improving the read tolerance of the memory.
To this end, SMIC applied for an invention patent (application number: 201710322968.X) on May 9, 2017 called "memory and its formation method", the applicant is SMIC Integrated Circuit Manufacturing (Shanghai) Co., Ltd. company.
According to the relevant information currently disclosed in the patent, let us take a look at this solution.
As shown in the figure above, it is a schematic diagram of the structure of the memory invented in this patent. The memory includes a substrate 100, a pull-down transistor (PD) 110D and a pass-gate transistor (PG) 110G, wherein the pull-down transistor and pass-gate transistor are both arranged on the substrate, and the lining The material of the bottom is usually in the form of silicon, germanium or a mixture of germanium and silicon, and the length L1 of the channel region of the pass-gate transistor is greater than the length L2 of the channel region of the pull-down transistor.
Also included on the memory is a pull-up transistor (PU) 110U, which is a transistor device with a wraparound gate, such as a wraparound gate nanowire field effect transistor (GAA NWFET). The pull-up transistor also includes nano-pillars 111 and gate structures 112, and the nano-pillars constitute the source and drain regions of the transistor.