Chinese semiconductor industry

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FriedButter

Major
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??? so you are hating on the new kid on the block? so, new guy can't have an opinion?
No, it just the first 3 posts of a new account seems odd. How many systems has SMEE shipped, where is Huawei Fab located at, and does SMIC/YMTC have those systems. It’s like if the new guy on the block comes up asking about the location of anti air systems, how many there are, and where the bunkers are.
 

hvpc

Junior Member
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I wouldn't take anything Sleepy says too seriously. The paper is clearly about the photoresist inspection equipment - in those circumstances you want to produce the sharpest images possible to test how well your inspection platform performs. This is not a test of the photoresists themselves; those are just used to provide sample images. The paper concludes that the inspection platform has reached the required level for first generation EUVL (7nm).

New people are always welcome and everyone is entitled to their opinions. It's just that you're not "new."
I would consider me as 'New".

I come across this forum while i was researching and updating my analysis of companies I invest in. I didn't even realize i had an account on this forum from before. I don't recall setting up a account...even if i did, it's obvious I didn't make good use of this website.

Thanks on your explanation that this is for photoresist inspection equipment. i see that now. it make sense what you said that sharp images is necessary to test the inspection platform.
 

hvpc

Junior Member
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No, it just the first 3 posts of a new account seems odd. How many systems has SMEE shipped, where is Huawei Fab located at, and does SMIC/YMTC have those systems. It’s like if the new guy on the block comes up asking about the location of anti air systems, how many there are, and where the bunkers are.
you seemed very paranoid with your conspiracy theory. haha

i'm just asking because info presented here is different from what i've heard.
 

tokenanalyst

Brigadier
Registered Member
Indeed. 290mJ exposure is definitely impressive :)...that is if this can be maintained through optical paths of a production scanner. I don't know about EUV scanners, but DUV scanners I worked with, the amount of energy that gets to the resist is like 1 or 2% of the original power that comes from the light source. I couldn't tell from the paper what kind of exposure setup or conditions was used to achieve 290mJ power at the resist level.
I and probably many here intrigued on the idea of the possibility of using SSMB as a light source, LPP EUV because was researched in the early 2000s way before SSMB was even researched needs giant multilayer mirror collectors to absorb ton of scattered EUV light therefore requiring higher power to even reach the needed dosage to deliver to the photoresist, SSMB probably wont need that, reducing cost in developing mirrors and probably developing complex photoresists. I KNOW I KNOW is for now an experiment and nobody know if going to workout but "necessity is the mother of invention". Do you or your friends know something about the project in China?
 

hvpc

Junior Member
Registered Member
I and probably many here intrigued on the idea of the possibility of using SSMB as a light source, LPP EUV because was researched in the early 2000s way before SSMB was even researched needs giant multilayer mirror collectors to absorb ton of scattered EUV light therefore requiring higher power to even reach the needed dosage to deliver to the photoresist, SSMB probably wont need that, reducing cost in developing mirrors and probably developing complex photoresists. I KNOW I KNOW is for now an experiment and nobody know if going to workout but "necessity is the mother of invention". Do you or your friends know something about the project in China?
I only know which companies are responsible for which components for a domestically built scanner. And I have some access to hearsays from various people in the industry. But, again, don't have very detailed access to actual progress. This is why it's hard for me to judge what is rumor and what is fact.

Question, is this forum an American webpage or is this a Chinese webpage. I couldn't tell since all the communication are in English...and all of you seem to have good command of English, too.
 

tokenanalyst

Brigadier
Registered Member
I only know which companies are responsible for which components for a domestically built scanner. And I have some access to hearsays from various people in the industry. But, again, don't have very detailed access to actual progress. This is why it's hard for me to judge what is rumor and what is fact.

Question, is this forum an American webpage or is this a Chinese webpage. I couldn't tell since all the communication are in English...and all of you seem to have good command of English, too.
People here are all over the world including i guess China and the U.S. and mostly used by China military enthusiasts and probably the CIA too, pretty much like the Pakistan defense forum.
 

hvpc

Junior Member
Registered Member
People here are all over the world including i guess China and the U.S. and mostly used by China military enthusiasts and probably the CIA too, pretty much like the Pakistan defense forum.
Ahhhh, I see.

I remember 10years ago I heard some asml guys talk about something that could be similar to this...was something like the size of a soccer field that could power more than 10 EUV systems. There was concern about environmental impact of something. But I guess they didn't go with this method. I wonder if it's the same as the SSMB technology that you are talking about. Have you heard about this before?

Let me do some research on SSMB to see if I can find anything useful for everyone.
 

tokenanalyst

Brigadier
Registered Member
Ahhhh, I see.

I remember 10years ago I heard some asml guys talk about something that could be similar to this...was something like the size of a soccer field that could power more than 10 EUV systems. There was concern about environmental impact of something. But I guess they didn't go with this method. I wonder if it's the same as the SSMB technology that you are talking about. Have you heard about this before?

Let me do some research on SSMB to see if I can find anything useful for everyone.
It was proposed by Stanford in 2015, a breakthrough was archived in 2020 by a team from Tsinghua and a German institute. If you read previous comments we have discussed the idea here.

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