Those are the expected results from a size perspective.
LW is the line width, which is in the tens of nm (22-68 nm)
LER is line error roughness. that's the deviation from straightness of a feature, not the feature size itself, and note how they're limited at around 2-3 nm. So errors get bigger relative to feature size as you move down in process.
What they're doing in that paper is developing an EUV photoresist with high resolution and testing a measurement platform. many photoresists in use now for ArF processes are polymeric resists which are easy to coat (spin coating the polymer solution) but have a resolution problem.
Let's take a positive photoresist - where exposed, it becomes more soluble. These contain a photoacid generator (PAG) which is an organic molecule that turns into a water soluble acid when exposed to UV light. This acid either directly dissolves away as part of the photoresist, or reacts with the photoresist.
Here's the problem - many organic molecules are soluble in polymers due to their loose pack molecular structure and similar chemical properties. So they'll move over time. Even motion of a few nm means that the edge of the exposed feature is no longer sharp. So for EUV, they need to develop a photoresist specifically for high resolution EUV processes.
Given that China is blocked from increasing production on advanced nodes chips, I will say this is very impressive:18% growth in IC sales sounds impressive, but it's disappointing when considering that global IC market grew 26% last year:
So China is actually losing ground compared to the world, and it needs to do more just to keep up, IMO.
That being said, this is genuinely good news:
Providing a breakdown, the association said sales of the manufacturing sector increased 24.1 per cent to 317.6 billion yuan, higher than the growth rate of the design sector and the packaging and testing sector, which were up 19.6 per cent and 10.1 per cent respectively.
Edit: According to , Europe leads with the fastest growth in semiconductor sales at 29%, followed by the U.S. at 27% followed by China at 24% and Japan bringing up the rear at 19%.
China produced 359.4 billion ICs in 2021, up 33.3 per cent year-on-year, doubling the rate seen in 2020, according to data released by China’s National Bureau of Statistics in January.
IMO the quantity of ICs produced is a more important measure than revenue. With inflation and increases in demand, the cost of ICs are surging worldwide leading to massive growth in revenue. China doesn't need to conquer the export market yet - that's step 2 and of lesser importance.Given that China is blocked from increasing production on advanced nodes chips, I will say this is very impressive:
Lam, together with ASML and imec, has created a breakthrough resist application technology that’s fundamentally different from spin-on liquid resists.
Sounds more like decoupling in this industry.
Some info on Lam Research.
@horse and the target is NOT China BUT Japan! it's shit to be a vassal no more Kimochi!Sounds more like decoupling in this industry.
Some info on Lam Research.
@horse and the target is NOT China BUT Japan! it's shit to be a vassal no more Kimochi!
And Japan please wake up! The Collective West doesn't treat you as one of them, at least the Indians with their delusional mindset had taken the hint, there is still a chance to salvage the situation with Gigaphoton LPP, you can have a JV with SMEE or else within 2 years that door will close, locked forever and you need to do a Hara Kiri just to same face.
Yes absolutely. I think that is the reason that ICRD has been doing all this research at the Shanghai Synchrotron with the SSMB Light Source Equipment.@WTAN Sir from my previous post, the possibility that SMIC can mass produce 5nm and 3nm Chips IF they received SMEE EUVL LPP by 2023/24 or 2025 EUVL SSMB? with all the materials needed and research done and dusted?
Taiwan and South Korea, both of them sanctioned Russia a couple of weeks ago, because Uncle Samuel demanded loyalty.
The Asian mind, thinks differently than white people.
Hehe ...
Does Taiwan and South Korea, want to be the Germany of Asia?
Double hehe ... hehe ...
What does that loyalty buys? When that synchrotron is coming for yo' arse?
Hey! Look! Once you take your oath of loyalty, then you are obligated to help Uncle Samuel improve his IC capabilities.
Whether the helper is promoted, or discarded, like Germany interests being thrown under the self-driving electric bus, we shall see, if they treat the Asian better than that white person who Uncle Samuel considered to be their friend.
Heck, even President Trump is Germany ancestry.