Huahong Grace has optimized the matching of scanners of different vendors (NIkon and ASML) using overlay,AEI and ADI inspection tools. They develop a model that allows to calibrate both immersion tools. If lithography manufacturers in China provide tools for matching domestic scanners these can operate alongside foreign scanners decreasing the barrier of adoption for domestic lithography scanners.
China doesn't have to wait for pure domestic fabs for these domestic scanners to increase their market share in the domestic market.


China doesn't have to wait for pure domestic fabs for these domestic scanners to increase their market share in the domestic market.

