On March 25, according to the Russian Satellite News Agency, Moscow Mayor Sergei Sobyanin recently posted on his "Telegram" channel account that Moscow's "Zelenograd Nanotechnology Center" company has completed the research and development of Russia's first 350nm lithography machine, which is a key equipment for the production of microchips.
After the outbreak of the Russia-Ukraine conflict, the United States and the West imposed more stringent export control measures on Russia, among which semiconductor equipment such as semiconductor chips and lithography machines became the focus of restrictions. This also forced Russia to begin developing domestically designed lithography machines.
In 2023, Vasily Shpak, Deputy Minister of Industry and Trade of the Russian Federation, said in an interview with the media that Russia will start producing 350nm lithography machines in 2024 and complete lithography machines for producing 130nm process chips in 2026. The production of lithography machines will be carried out in existing factories in Moscow, Zelenograd, St. Petersburg and Novosibirsk.
Then in May 2024, Russia's TASS reported that during the CIPR 2024 conference, Vasily Shpak announced that Russia's first domestically produced lithography machine had been assembled and was being tested in Zelenograd, and the equipment could ensure the production of 350nm chips. However, Vasily Shpak did not disclose more details about the lithography machine at the time.
The latest revelations from Moscow Mayor Sergei Sobyanin recently showed that Moscow's "Zelenograd Nanotechnology Center" has completed the research and development of Russia's first 350nm lithography machine, and exposed some related photos.
"There are less than 10 countries in the world capable of manufacturing this key microchip production equipment, and now Russia is among them. We have taken the most important step towards the transition to independent production of microelectronics and complete national technological independence." Sobyanin also pointed out that this Russian equipment is very different from similar foreign equipment. This Russian equipment is the first to use solid-state lasers as radiation devices instead of mercury lamps. Solid-state lasers have high power, high energy efficiency, strong durability, and a narrower spectrum.
As we all know, lithography machines are extremely important for the production of semiconductors. Currently, only four companies in the world can produce lithography machines: ASML in the Netherlands, Nikon and Canon in Japan, and Shanghai Microelectronics in China. However, only ASML, Nikon and Canon can supply lithography machines that can produce advanced processes. Although 350nm is a very mature process, it can still meet the chip needs of some automotive, energy and communications industries.
Anatoly Kovalev, general manager of the Moscow-based Zelenograd Nanotechnology Center, said: “Our company has completed the development of Russia’s first 350nm topology projection lithography machine under a state contract. The project was implemented in cooperation with the Belarusian Planar plant. After successful testing in December 2024, the lithography machine was approved by the state committee and all declared technical characteristics were recorded. A customer has already purchased the equipment, and the process flow of the equipment is now being adjusted to the special production requirements of the end user.”
It is reported that the working area of the 350nm lithography machine has been significantly increased to 22mm × 22mm, and can process wafers with a maximum diameter of 200mm.
According to the Moscow Investment and Industrial Policy Bureau, the Zelenograd Nanotechnology Center is ready to mass-produce this 350nm lithography machine. In addition, the Zelenograd Nanotechnology Center is currently continuing the research and development of a 130nm lithography machine under a second state contract, which is expected to be completed in 2026.
According to a previously exposed plan, Russia will allocate 211.4 billion rubles (about 16.616 billion yuan) in 2024 for the development of domestic electronic products, which will include lithography machines that can produce 350nm process chips, and will start producing 130nm process chips in 2026.
