Following the launch and mass production of the AP7XP (12.5nm particle inspection capability) by Onkun Semiconductor in October 2025, Onkun Semiconductor's AP8 wafer particle defect inspection equipment, a core new product at this exhibition, achieves 10.5nm particle inspection capability, fully adapting to the needs of advanced processes. The equipment features a self-developed optical system and AI intelligent classification algorithm, with all core components domestically produced, breaking the foreign technology monopoly and providing domestic customers with an independent, controllable, and highly stable mass production solution. Several customers at the exhibition have already expressed their intention to produce demo samples, helping domestically produced high-end inspection equipment enter the production line verification stage.
Core products upgraded again! Three major series of equipment demonstrate the company's strong technical capabilities across all scenarios.
At this exhibition, Onkun Semiconductor also showcased three core product series: integrated circuit metrology, compound semiconductor metrology, and in-situ monitoring and infrared thermometry, presenting a complete semiconductor metrology solution.
Integrated Circuit Measurement Series
Focusing on the full-scenario inspection needs of 12-inch wafers, we offer a complete solution covering geometry and particle defects. Geometry measurement achieves sub-nanometer high-precision inspection, adapting to special scenarios such as large warpage wafers and bonded wafers, and supports collaborative use with bonding equipment. Particle defect detection covers multiple sensitivity levels, balancing advanced processes and mature technologies, forming a complete product line.
Compound semiconductor and LED lighting measurement series
In the field of wide bandgap semiconductors, Onkun's Eagle series equipment has a wide range of market applications, has achieved full-process testing coverage, and has gained high recognition from the upstream and downstream of the industry chain. It has broken the long-term dominance of foreign equipment in this field and provided support for the independent control of China's compound semiconductor industry.
In-situ monitoring and infrared thermometry series
This product series represents the pinnacle of domestic technology in this field, overcoming technical challenges in high-end models and achieving mass production. Leveraging its advantages in precise measurement, strong anti-interference capabilities, and equipment integration, the products hold a leading market share in China, addressing the reliance on imported temperature measurement modules for high-end epitaxial equipment. They also play a leading role in defining domestic high-end process monitoring standards, providing core support for the independent development of the semiconductor industry chain.