Chinese semiconductor thread II

J

justinlee

Just Hatched
Registered Member
tphuang said:
yes, SSC800 is KRF if you do a search. This is what hvpc said a while back.

At this point, I don't think you need to do a bid for SSA800. You either buy it or you don't.

The key here is that it's considered to be matured and reliable enough that it's going through bids. But IIRC, KRF scanners are around $10m so this is more expensive than imported ones. That tells me they have yet to scale up production. Either that or imports got a lot more expensive.

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Data from MIIT:
KrF Litho: Wavelength=193mm, Resolution≤65nm, overlay≤8nm

and ASML websites:
TWINSCAN XT：1460K:
Wavelength=193mm, Resolution≤65nm, similar spec, and ask for €12m ~ ¥100m

I think it's fair enough after tax :D
 
J

justinlee

Just Hatched
Registered Member
latenlazy said:
If those are the numbers MIIT provided then it’s not KrF.
Click to expand...
Sry my mistake. I accidentally copy paste ArF litho spec on MIIT website.

ERRATA
具体来看，氟化氪光刻机晶圆直径为300mm（12英寸）；照明波长为248mm；分辨率≤110nm；套刻≤25nm

TWINSCAN XT：1460K:
similar spec, and ask for €12m ~ ¥100mIMG_3946.jpeg
 
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