I went through all of this yesterday. Actually, very interesting stuff across the board. They key here is that the tools developed for DUV and EUV supply chain are widely applicable elsewhere also.
H Series - so the high speed laser interferometer is used in lithography machine and high end machine tools. And the global competition here is from Keysight and ZYGO
going to Keysight website
wide range of application for calibration, analysis and inspection. Which is obviously useful in many semiconductor applications
P Series is interesting too
picometer series laser interferometers pursue ultimate measurement accuracy in a vacuum, with noise standard deviation as low as 20pm, periodic nonlinearity as low as 10pm, and thermal stability better than 30pm/mk
again says for application
Advanced lithography machine objective lens system monitoring
Metrology and calibration: Nano-pressure stations, capacitance sensors, other types of laser interferometer
Frontier science: Quantum mass benchmark equipment
Seems pretty important across the board.
other two seems less important to semiconductor. Overall, the level of measurement related stuff here kind of validates also just how important oscilloscopes are