Chinese semiconductor thread II

jli88

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I'm surprised people are not commenting on this one more, since Lingju Tech here has already delivered 150 of its laser interferometer. That's a huge number for not just lithography, but also CNCs, optical systems & micro-electronics measurement.

10 million yuan seems to be too low a sum that anyone would target to raise if they are already delivering products at this scale. I find something missing here.
 

tphuang

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Harbin HIT’s ultra precision laser interferometer tech commercialized in Shenzhen
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Many EUV suppliers have surfaced recently.

Here’s another one. Worlds largest aperture IBF ultra precision polishing system. This is big enough for polishing HighNA EUV mirrors. They are building the entire EUV supply chain in record time
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I went through all of this yesterday. Actually, very interesting stuff across the board. They key here is that the tools developed for DUV and EUV supply chain are widely applicable elsewhere also.

H Series - so the high speed laser interferometer is used in lithography machine and high end machine tools. And the global competition here is from Keysight and ZYGO
领聚科技的高速系列激光干涉仪,可支持多自由度运动台的0.02nm测量分辦力、2.7m/s测量速度和10MIHz动态更新率。
可实现对光刻机为代表的高端装备精密运动台的高精度动态实时六自由度同步测量。
H系列激光干涉系统可以实现对Keysight、ZYGO 同类产品的原位替代。

going to Keysight website
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Keysight's Laser interferometer position measurement systems provide very precise position or distance information for dimensional measurements or motion control. We offers a variety of industry-leading solutions in laser interferometer products that are ideal for:
  • Laser-based Dynamic Calibration Systems
  • Mechanical parts inspection and measurement
  • Mechanical vibration analysis
  • Semiconductor fabrication, inspection and repair
wide range of application for calibration, analysis and inspection. Which is obviously useful in many semiconductor applications


P Series is interesting too
领聚科技的皮米系列激光干涉仪,追求真空中的极致测量精度,噪声标准差低至 20pm,周期非线性低至10pm,热稳定度优于 30pm/mk,支持不同场景下的灵活定制,为用户提供系统设计、指标分析、等全套解决方案。
picometer series laser interferometers pursue ultimate measurement accuracy in a vacuum, with noise standard deviation as low as 20pm, periodic nonlinearity as low as 10pm, and thermal stability better than 30pm/mk
again says for application
高端装备:先进光刻机物镜系统监测
计量校准:纳米压电台、电容传感器、其它型激光干涉仪等
前沿科学:量子化质量基准装
Advanced lithography machine objective lens system monitoring
Metrology and calibration: Nano-pressure stations, capacitance sensors, other types of laser interferometer
Frontier science: Quantum mass benchmark equipment

Seems pretty important across the board.

other two seems less important to semiconductor. Overall, the level of measurement related stuff here kind of validates also just how important oscilloscopes are
 

bsdnf

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I went through all of this yesterday. Actually, very interesting stuff across the board. They key here is that the tools developed for DUV and EUV supply chain are widely applicable elsewhere also.

H Series - so the high speed laser interferometer is used in lithography machine and high end machine tools. And the global competition here is from Keysight and ZYGO


going to Keysight website
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wide range of application for calibration, analysis and inspection. Which is obviously useful in many semiconductor applications


P Series is interesting too

picometer series laser interferometers pursue ultimate measurement accuracy in a vacuum, with noise standard deviation as low as 20pm, periodic nonlinearity as low as 10pm, and thermal stability better than 30pm/mk
again says for application

Advanced lithography machine objective lens system monitoring
Metrology and calibration: Nano-pressure stations, capacitance sensors, other types of laser interferometer
Frontier science: Quantum mass benchmark equipment

Seems pretty important across the board.

other two seems less important to semiconductor. Overall, the level of measurement related stuff here kind of validates also just how important oscilloscopes are
Recently (or rather, consistently), social media hype surrounding lithography and ASML has led to excessive focus on the lithography machines themselves, while the greater transformation lies within the entire industrial chain.

This is also why I believe the progress of domestically produced DUV/EUV systems won't be too rapid—because it truly involves full autonomy and control across all aspects. But when it is finally completed, the domestic supply chain behind it will be exceptionally robust.
 

tokenanalyst

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China precision measurement companies, for semiconductors and other industrial applications.

Chotest:


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With more than 15 years of professional technology accumulation, we designed and manufactured White Light Interferometer SuperView W1, Laser Tracker GT series, Universal Thread Measuring Machines SJ5200 series, Universal Length Measuring Machines SJ5100 series, Laser Interferometer SJ6000, Profilometers SJ5700 series, Automated Dial Indicator Testing Machines SJ2000 series and other high-end measuring equipment. We provide high precision measurement solution from nanometer to hundred meters.

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Shanghai Paipin:

Shanghai Pai-pin Optic-Electric Technology Co., Ltd. specializes in dual frequency laser interferometry technology research and product development. Our services serve the semiconductor equipment, ultra-precision motion control, length metrology, precision machine tool calibration, vibration, velocity, and acceleration testing industries.

Our core team is composed of professionals in optics, mechanics, electronics, sales, etc., with more than ten years of experience in dual-frequency laser interferometer product development and its application. We are one of the dual-frequency laser interferometer teams with the most extensive engineering experience in China.


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Tsinghua U-Precision:
Beijing Huazhuo Jingke Technology Co., Ltd. was established on May 9, 2012. It is a national high-tech enterprise. Its main business is to research, develop and produce ultra-precision measurement and control equipment components and ultra-precision measurement and control equipment complete machines based on ultra-precision measurement and control technology, and provide related technology development services.

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Beijing Leice:

Beijing Leice Technology Co. Ltd., originated from Sate Key Laboratory of Precision Measurement Technology Instruments, Tsinghua University, is a high-tech company that offers measurement solutions as well as precision laser measurement instruments with independent intellectual property rights.Leice offers dual-frequency laser interferometer, laser feedback interferometer, phase retardation measurement instrument, laser teaching instrument, and laser nanometer ruler, etc. It can meet the demand for precision measurement of mechanical manufacturing, microelectronics, optical manufacturing, scientific research and education industries, etc.

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And others

China Interferometer Landscape.​


Shanghai Qianyao Technology

Quantum laser interferometer Q-Laser 9000:
By using the self-developed "dual-frequency laser orthogonal demodulation technology", it achieved a repeatable positioning accuracy of ±0.05nm in the detection of the 28nm lithography machine motion platform, forcing Agilent of the United States to reduce the price of similar products in China by 28%.

Industrial site solutions:

We jointly built a "dynamic environmental compensation system" with SMIC, which maintained a measurement stability of 99.7% under harsh conditions where the workshop vibration exceeded the standard by 5μm/s², rewriting the ASME B89.1.7 standard.

Suzhou Huili Instruments - AI Revolutionary in Optical Measurement

Intelligent White Light Interferometer Wisper-7D:
Equipped with the world's first "deep learning morphology reconstruction engine", it increases the speed of 3D surface roughness inspection to 0.8 seconds per field of view, replacing 70% of the US Bruker market share in the automotive engine cylinder inspection market.
Cloud Collaborative Network:
By building a cross-factory measurement data lake and training AI models in real time through 160,000 devices, the accuracy of defect recognition has increased by 3.2% every quarter, forming a technological iteration moat


FiberSight XT fiber distributed interferometer:
In the Sichuan-Tibet Railway project, 200km distributed strain monitoring was achieved, and the temperature drift was controlled at 0.02pm/℃, with parameters exceeding the HD-FOS system of Luna Company in the United States.

Deep sea 10,000-meter pressure-resistant design:
The titanium alloy photonic crystal packaging technology was used to help the Jiaolong complete the deformation monitoring of submarine optical cables at 10,909 meters in the Mariana Trench, breaking the technical blockade of Japan's JAMSTEC

Extreme Ultraviolet Interferometry System EUV-IM:

It provides λ/1000 (@13.5nm) wavefront detection capability for lithography machines, enabling the workpiece stage stitching accuracy to reach 0.12nm. The key technology won the 2023 China Patent Gold Award.

Spaceborne interferometer Tianxun series:
The Fengyun-4 meteorological satellite achieved 0.01°C resolution monitoring of space temperature field, and the data quality was rated five stars by the World Meteorological Organization.

NanoTracker nanodisplacement measurement system:

Based on common optical path interference design, the uncertainty of displacement measurement in the semiconductor packaging process is reduced to 0.3nm, helping Changdian Technology to increase its yield to 99.9995%.

Wafer-level online detection solution:
Developed a 12-inch wafer fully automatic scanning system, with a daily inspection capacity of over 1,500 wafers, and a 42% increase in overall efficiency compared to Zygo in the United States.
 

tokenanalyst

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With a total investment of 1.15 billion yuan, the construction of Haona Optoelectronics' high-precision optical components and ultra-precision molds project has started.​


The project, with a total investment of 1.15 billion yuan, plans to build a production base for high-precision optical components and ultra-precision molds. Upon completion and commissioning, the project will further enhance Jin'an District's electronic information industry chain and boost its overall competitiveness.

Jiangsu Haona Optoelectronics Co., Ltd. specializes in the production of glass aspheric lenses and their high-precision lens molds. Its production capacity ranks among the industry's top. Its primary customers are in the optical fields of high-end 3C, automotive, AR/VR, security surveillance, robotics, smart home, and other sectors. Its downstream customers include leading companies such as Sunny Optical, O-Film, United Optoelectronics, Dayuan Optoelectronics, and DJI. Recently, the Jiangsu Province New Quality Productivity Promotion Center released the results of its 2025 assessment of Jiangsu's unicorn and gazelle enterprises, and Jiangsu Haona Optoelectronics Co., Ltd. was recognized as a provincial gazelle enterprise. Haona Optoelectronics' product precision and optical performance far exceed industry standards, and has been awarded the "First Prize of the China Nonferrous Metals Industry Science and Technology Award," "National High-tech Enterprise," "Jiangsu Province Four-Star Cloud Computing Enterprise," "Suzhou Engineering Technology Research Center," "Innovative Small and Medium-sized Enterprise," and "Three Firsts and Two New" honors.

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tokenanalyst

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Lixinyuan and Loongson Zhongke signed a strategic cooperation agreement, and domestic ultrasonic scanning microscopes fully applied Loongson's underlying products​


On October 16, Shenzhen Lixinyuan Technology Co., Ltd. and Loongson Technology Co., Ltd. successfully held a "Strategic Cooperation Agreement Signing Ceremony" during the 2025 Bay Area Semiconductor Industry Ecosystem Expo (hereinafter referred to as "Bay Area Semiconductor Expo"), which attracted great attention from the industry.

At this year's BayCore Exhibition, Oak New Source released its first ultrasonic scanning microscope OAK-SAM001. The device fully utilizes the Loongson self-controllable microprocessor and the Loongnix domestic operating system, replacing the traditional combination of Windows operating system and X86 processor, achieving full-stack independent innovation from core hardware to system software, which not only ensures the high compatibility between the operating system and hardware, but also enables various applications to work together efficiently, providing a stable and reliable operating platform for the equipment.

At the same time, through deep optimization of the domestic operating system, the OAK-SAM001 maintains excellent performance in underlying security, system operating efficiency, and data processing accuracy. Its core characteristics of safety, reliability, and independent control fully meet the stringent requirements of industrial testing and scientific research for high-precision imaging and system stability, effectively ensuring reliability and security in various application scenarios. Zhou Yanlin, General Manager of Oak New Source, stated, "Our collaboration with Loongson Zhongke is a comprehensive breakthrough in the localization ecosystem. Together, we have taken a solid step towards the localization of equipment in the semiconductor industry chain. In the future, we will continue to work together with a common goal in mind."

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tokenanalyst

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Huaxinbang : Will build new SiC chip and packaging and testing projects


On October 17, according to Nanhaiwang, Hainan Huaxin Intelligent Manufacturing Semiconductor Co. , Ltd., a subsidiary of Shenzhen Huaxinbang Technology Co., Ltd., plans to invest in a silicon carbide project in the Haikou Comprehensive Bonded Zone.

The article revealed that since its establishment in 2008, Huaxinbang Technology Co., Ltd. has focused on mixed analog and digital chip design and advanced packaging and testing technology. It is an integrated circuit company rooted in Shenzhen and with a global layout. It currently has chip research and development and process manufacturing centers in Suzhou and Taipei respectively.

Huaxinbang plans to invest 335 million yuan in the Haikou Comprehensive Bonded Zone to build a production base for display module manufacturing and advanced packaging and testing of silicon carbide chips. The project will be implemented in phases. The initial phase will utilize approximately 8,482 square meters of space in Building 5 of the park to construct a pilot line and four AMOLED screen module production lines. Subsequently, based on development needs, the area will be expanded to approximately 17,000 square meters, enabling full-process mass production of silicon carbide chips and adding four new module production lines, forming a complete industrial chain layout.

Hu Xin, deputy general manager of Hainan Huaxin Intelligent Manufacturing Semiconductor Co., Ltd., also said in an interview with reporters that Huaxinbang will accelerate the registration and site selection of its subsidiary in Hainan, focusing on the layout of R&D and advanced packaging production lines for overseas markets.

 

tokenanalyst

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Zhongke Guangzhi to build a SiC chip packaging equipment R&D and manufacturing center


Recently, Zhongke Guangzhi disclosed on its official Weibo account that they have just completed the first signing of the B round of financing, obtaining tens of millions of yuan in investment from Chengdu Jinniu District Jiaozi Private Equity Fund Management Co., Ltd., and established Zhongke Guangzhi (Chengdu) Technology Co., Ltd., focusing on building a silicon carbide chip packaging equipment R&D and manufacturing center, focusing on the R&D and industrialization of high-precision fully automatic placement machine products.

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Zhongke Guangzhi said that as an important step in Zhongke Guangzhi's layout of the southwest market, Zhongke Guangzhi's Chengdu subsidiary will further serve the company's strategic layout of " based in the headquarters and radiating across the country ". By building and forming a collaborative link between the headquarters and subsidiaries, it will give full play to the advantages of regional resource complementarity and strive to achieve a synergistic gain effect of "1+1>2".

Among them, Zhongke Guangzhi's chip placement equipment features full automation and high precision, which can better meet customers' process requirements. By optimizing bonding heads and replacing imported parts, they can help customers significantly reduce costs. Regarding silver sintering equipment, Zhongke Guangzhi was the first to market single-head pressure sintering equipment. The development of fully automatic multi-head pressure sintering equipment is also progressing smoothly and is about to be introduced to the market for downstream customers' SiC module production line

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