InnoVac has applied for a patent for a droplet target generator for EUV light sources, which can produce stable, large-spaced, monodisperse droplets.
Information from the State Intellectual Property Office shows that InnoVac. has applied for a patent called "A droplet target generating device for EUV light source", publication number CN120404072A, and the application date is May 2025.
The patent abstract shows that the present invention relates to the field of fluid mechanics technology, and in particular to a droplet target generating device for EUV light sources, comprising: a liquid supply component, a droplet ejection component and a piezoelectric drive component; the present invention utilizes an air pressure controller to apply positive pressure to the solution in the liquid reservoir, supplies the solution to the nozzle to extrude the jet, and then switches to negative pressure to force the jet to terminate, and the nozzle mouth maintains an inward meniscus; the piezoelectric element is then driven by a drive signal controller, and the deformation of the piezoelectric element is utilized to generate alternating positive and negative acoustic pressure waves in the liquid in the capillary, and the acoustic pressure waves are transmitted to the nozzle mouth to eject droplets; and the device can obtain the generation of stable droplets of different frequencies by setting the parameters of the drive signal controller. It has simple operation, precise control, and a large adjustable range, and can generate stable, large-spacing monodisperse droplets, which is suitable for the generation of droplet targets in EUV light sources.