Gallium Semiconductor successfully grew a 100 mm gallium oxide single crystal using
the vertical Bridgman (VB) method. After iterative process optimization, it successfully achieved the preparation of a 100 mm (010) surface gallium oxide single crystal substrate and carried out characterization tests. The test results showed that there were no twins in the substrate, the full width at half maximum (FWHM) of the XRD rocking curve of the single crystal substrate was less than 50 arcsec, and the surface roughness (RMS) of the substrate was less than 0.1 nm, and
the quality reached the international advanced level .

What are the advantages of choosing the (010) surface for gallium oxide growth?
Among the common mainstream crystal planes of gallium oxide single crystal substrates, the (010) substrate has excellent performance in physical properties and epitaxy:
1. (010) The substrate has the highest thermal conductivity, which is beneficial to improving the performance of power devices;
2. The (010) substrate has a faster epitaxial growth rate and good epitaxial matching, and is the preferred crystal plane for epitaxy.
At present, Gallium Ren Semiconductor has launched
wafer-level (010) gallium oxide single crystal substrate products . This product is aimed at the scientific research market, meets the demand for (010) substrates in the scientific research field, and promotes collaborative cooperation between industry, academia and research.
Why use VB method to grow gallium oxide single crystals?
The VB method has significant advantages in the growth of gallium oxide single crystals and is becoming the new favorite in the industry. Domestic and foreign gallium oxide substrate manufacturers have begun to make plans.
Advantage 1 : The VB method is suitable for growing gallium oxide single crystals with the axis parallel to the [010] crystal direction, which is conducive to processing large-size (010) surface single crystal substrates.
Advantage 2 : The VB method does not use the precious metal iridium crucible, and there is no need to consider the oxidation loss of the crucible. Compared with the common growth method using iridium crucible, the cost is greatly reduced.
Advantage 3 : The VB method can use air atmosphere to grow single crystals, which can effectively inhibit the high-temperature decomposition of gallium oxide, reduce defects such as inclusions in the crystal due to crucible corrosion, and improve crystal quality.
Advantage 4 : The VB method has a small temperature gradient, and the number of dislocations induced by thermal stress in the crystal is small, so the crystal quality is high.
Advantage 5 : VB method crystals grow in a crucible, and the crystal diameter is the crucible diameter, so there is no need to control the crystal diameter. The technical difficulty is low and the stability is high, and it is easy to achieve automatic control.
What kind of equipment is used for growing gallium oxide by the VB method?
In September 2024, Gallium Ren Semiconductor launched the first self-developed gallium oxide dedicated crystal growth equipment, which not only meets the requirements of gallium oxide growth for high temperature and high oxygen environment, but also can perform fully automated crystal growth, reducing human intervention and significantly improving production efficiency and crystal quality. The equipment can obtain large-size single crystals with various crystal faces through process control, and supports the upgrade to larger-size single crystals, meeting the scientific research and production needs of universities, research institutes, and corporate customers for gallium oxide crystal growth.
This type of gallium oxide VB method crystal growth equipment and its process package have been fully opened.
