Providing a new domestically produced ion source for ion beam polishing machines.
2021
Customer Introduction
The case client is a professional manufacturer of precision optical components and equipment. Its main products are ion beam polishers, magnetorheological polishers, etc. It provides ultra-precision optical process manufacturing and R&D services and is an ultra-precision optical component solution provider.
Ion beam polishing: It is suitable for ultra-high precision non-contact shaping and polishing of large-area, special-shaped, special-material processing objects. The accuracy can reach sub-nanometer level and it is known as the ultimate polishing.
Customer needs & pain points
Application direction: Non-contact sub-nanometer ion beam surface modification
Application areas: semiconductor/precision optics
Product Category: High Precision Optical Devices
Processing index:
1. Processing size capability 5-1200mm;
2. Non-contact processing is adopted, with no edge effect and no sub-surface damage;
3. Sub-nanometer processing accuracy, capable of achieving high-precision polishing capability of surface RMS < 3nm;
4. The shapes of processed optical components include: plane, spherical, aspherical, free-form, off-axis aspherical, etc.;
5. The materials for processing optical components include: quartz glass, microcrystal, ultra-low expansion glass (ULE), KDP crystal, sapphire, silicon, silicon carbide, infrared materials, etc.
Customer pain points:
The core component of an ion beam polisher is a focusable high-energy ion source . However, the principle and structure of this type of ion source are extremely difficult, and it can only be imported from abroad for a long time . Customers have to endure extremely unreasonable prices and extremely long delivery times . Boden's DISE DC ion source was born for this purpose, achieving a breakthrough in the localization of this type of ion source, while also completing innovations such as ultra-long working hours and portability .
Product introduction: The special DC ion source independently developed by Boton Optoelectronics can be equipped with a multi-layer grid with an aperture of 1.5cm/3cm/5cm/6cm, which can emit a convergent ion beam with an ion energy range of 50-1500eV and an ion beam current range of 30-300mA. It uses a patented hollow cathode structure and consumables,
generates little heat , and can be used continuously for
more than 100 hours .
It supports a movable structure and can be used for
ion beam cleaning, ion beam assist, ion beam etching, ion beam shaping and polishing .
Typical applications: DISE DC ion sourceplays a key role in the ultra-precision processing of core key components of lithography machines and laser gyroscopes .
The core equipment for chip manufacturing is the photolithography machine, and the optical . The surface processing of the lens with this precision must be ion beam polished and shaped before coating can be carried out.
Gyroscopes are the core components of inertial navigation systems, and they mainly include wound gyroscopes, electrostatic gyroscopes, laser gyroscopes, fiber optic gyroscopes, and micromechanical gyroscopes. Among them, laser gyroscopes have always occupied a dominant position in the field of high-precision control. The optical lenses in laser gyroscopes have extremely high requirements for their surface shape, and their accuracy determines the navigation accuracy and success . They must also be shaped and polished with ion beams.