Chinese semiconductor thread II
- Thread starter vincent
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193 Nm Immersion Photodetector with an Ultra-High Eqe of 83.7 %
Abstract
With the development of chip to high-density integration, the requirement of lithography precision is higher and higher. In this process, controlling the power of the lithography exposure light source is very important to improve the quality of the chip. However, most detectors are unable to conduct light detection in liquid environments, especially in the aspects of real-time detection and calibration of light power in immersion deep ultraviolet lithography. In this paper, the AlN film epitaxial on n-SiC substrate by MOCVD is used as the photoelectrode, based on which an immersion detector with a quick response to 193 nm vacuum ultraviolet (VUV) light is fabricated. Impressively, under 0 V bias, the detector achieves a high responsiveness (130 mA/W) and an EQE up to 83.7 % under an excitation with lower light power (45 nW), illustrating its ability to perform highly efficient detection of light signals and underwater imaging in weak-light environment. In addition, the detector also has the shortest detection wavelength when compared with the immersion photodetectors reported so far. At the same time, the simulated immersion lithography monitoring experiment shows that the detector has good real-time monitoring ability. In a word, this work provides a novel method for detecting underwater light power and can work as reference for realizing the real-time monitoring of immersive lithography light sources in future applications.
Wow all the subsystem for EUV and DUVi are there. The thing is the none of the industrialists and liberals in China, probably including Huawei, took these projects seriously until the Washington D.C. think tank instigated knife started to get closer and closer to the neck.
China is Buying Record Amounts of Semiconductor Manufacturing Equipment to Fortify its Chip Industry—While DC Tries to Clamp Down Harder With Sanctions
Feb 17, 2024...
Last year, China imported record amounts of manufacturing equipment in categories throughout the semiconductor production process, but by far the largest increase came from “other apparatus used to project circuits”—a category primarily composed of the lithography equipment used to print circuitry patterns onto silicon wafers. Chinese imports of those lithography machines hit a record high of more than $7B in 2023, rising more than 270% from a year earlier. Imports of dry plasma etching machines used to carve out those printed circuitry patterns are also at record highs, as are imports of equipment used in Chemical and Physical Vapor Deposition processes that layer essential structures on carved-out patterns plus imports of the ion implanters used to then imbue those patterns with electrical properties.
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Sick and tired of having to repost this every time Raimondo throws a tantrum.
They are stockpiling these machines in some cases for spare parts to keep lines working, the question will be if this is the year when the winter comes for US companies in China. The situation for ASML in 2024 I think is going to be pretty dire, their most profitable ArFi scanners <NXT2100, NXT2050, NXT2000> are completely banned, the <NXT1980, NXT1970> basically depend on the stooges in D.C., so that is not comforting, the <NXT1960 and NXT1950> are not even made anymore given that they have been upgrading those to the NXT1980. "BUH THEY CAN STILL SELL THEIR DRY SCANNERS" those are not even close to be as profitable as their ArFi and EUV scanners and given that China represent a good percentage of their tools sale is a pretty rough situation. That is probably why they are rushing their HighNA EUV machines to offset the lost of sale of their ArFi line
And that is not even counting breakthroughs in China lithography supply chain, everything indicate that China is gearing up to mass produce lithography machines. RSLASER, Guowang Optical, U-Precision, Fortune Precision and others, all of them builded and are starting to operate massive production facilities for lithography machines parts and components.
Let see what happens. I think is going to be a pretty rough year.
And that is not even counting breakthroughs in China lithography supply chain, everything indicate that China is gearing up to mass produce lithography machines. RSLASER, Guowang Optical, U-Precision, Fortune Precision and others, all of them builded and are starting to operate massive production facilities for lithography machines parts and components.
Let see what happens. I think is going to be a pretty rough year.
Yeah the liberals and business community always sneer at state led projects. They only pay attention once some private upstart emerges out of nowhere and starts gaining marketshare, as if they just mysteriously and inexplicably walked out from the sea.
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