I'd just like to give a brief introduction to this topic.
For those who aren't as familiar, this is a EUV photoresist. You can easily tell just by looking at it because this is an organometallic compound containing In, which has a high EUV absorption cross section.
the purpose of the organic component is to change solubility. when the metallic component absorbs energy from the EUV illumination, it transfers that through bond breaking/reforming with the organic component, which changes its solubility.
There are challenges for a EUV photoresist which includes low outgassing in vacuum environments (does not contaminate lithography chamber), high resolution (only what is illuminated has photochemical reaction), high contrast (very different developer solution solubility for illuminated/nonilluminated regions) and nanoscale dimensional stability (does not change shape when placed in developer solution).